Microstructure Technology
Lab workers in the clean room inspect the results.
This research group concentrates fundamentally on function and design of micro- and nano-optical elements as well as applications and technology developments for micro strcuturing. The following research priorities have been edited:
- Plasmonic resonant nanometric metal rings
- Resonant reflective monolithic grating structures
- Transmissive reflective and diffractive elements based on effective media
- Metallic and dielectric polarizers from IR to DUV rage
- 3D nano-structuring of crystals with ion beam enhanced etchings
- Optical and opto-electronic applications of antireflective fused silica and silicon surfaces
- Microoptical light-trapping in optoelectronic devices
- Material-scientific aspects
Amongst others, outstanding results are: 3D nanostructures in Lithumniobat • broadband DUV polarizer based on metal strip gratings up to 190nm wavelength • highly reflective monolithic dielectric resonant mirrors • high-efficient mulltilevel-phase structures for nonparaxial diffractive elements and reflection-reduced pulse compressor gratings.
Thomas Siefke, Dr
Responsible Person

Image: Ira Winkler (Universität Jena)
IAP, Room 257
Albert-Einstein-Straße 15
07745 Jena