Microstructure Technology

This research group concentrates fundamentally on function and design of micro- and nano-optical elements as well as applications and technology developments for micro strcuturing. The following research priorities have been edited:

• Plasmonic resonant nanometric metal rings
• Resonant reflective monolithic grating structures
• Transmissive reflective and diffractive elements based on effective media
• Metallic and dielectric polarizers from IR to DUV rage
• 3D nano-structuring of crystals with ion beam enhanced etchings
• Optical and opto-electronic applications of antireflective fused silica and silicon surfaces
• Microoptical light-trapping in optoelectronic devices
• Material-scientific aspects

Amongst others, outstanding results are: 3D nanostructures in Lithumniobat • broadband DUV polarizer based on metal strip gratings up to 190nm wavelength • highly reflective monolithic dielectric resonant mirrors • high-efficient mulltilevel-phase structures for nonparaxial diffractive elements and reflection-reduced pulse compressor gratings.