cell based EUV sources for industry, research & life science


FKZ: 2021FE9142
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Subproject: "Fundamental investigations on pulse compression in gas-filled multipass cells"

The aim of the MULTIPASS project is the research and development of a highly efficient and scalable method for the pulse compression of ultrashort pulse lasers. This would enable a broader range of applications for these sources, especially in the field of frequency conversion processes.

At the core of the project are noble gas-filled multipass cells, which enable nearly lossless spectral broadening of ultrashort laser pulses. They allow for scaling to unprecedented levels of pulse energy and average power while providing high alignment tolerances, which is a necessity for the reliable implementation in industrial systems. Areas of innovation will be pulse energy scaling, shortening of the pulse duration to a few optical cycles, enhancement of pulse quality and the transfer to 2┬Ám wavelength. All leading into the development of more powerful and compact coherent EUV sources.

MULTIPASS is a joint project, where the Institute of Applied Physics investigates the fundamental aspects of pulse compression, the LAYERTEC GmbH focuses on the development of broadband and high-performance optical mirrors while the Active Fiber Systems GmbH utilizes the findings and components of the partners to develop reliable and long-term stable systems.