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289 L. Ghazaryan, S. Handa, P. Schmitt, V. Beladiya, V. Roddatis, A. Tünnermann, A. Szeghalmi, "Structural, optical, and mechanical properties of TiO2 nanolaminates," NanoTechnology 32 (9) (2021).
288 P. Paul, M. G. Hafiz, P. Schmitt, C. Patzig, F. Otto, T. Fritz, A. Tünnermann, A. Szeghalmi, "Optical bandgap control in Al2O3/TiO2 heterostructures by plasma enhanced atomic layer deposition: Toward quantizing structures and tailored binary oxides," Spectroc. Acta Pt. A-Molec. Biomolec. Spectr. 252 119508 (2021).
287 C. Rupprecht, E. Sedov, M. Klaas, H. Knopf, M. Blei, N. Lundt, S. Tongay, T. Taniguchi, K. Watanabe, U. Schulz, A. Kavokin, F. Eilenberger, S. Hofling, C. Schneider, "Manipulation of room-temperature valley-coherent exciton-polaritons in atomically thin crystals by real and artificial magnetic fields," 2d Mater. 7 (3), 035025 (2020).
286 K. Dietrich, M. Zilk, M. Steglich, T. Siefke, U. Hübner, T. Pertsch, C. Rockstuhl, A. Tünnermann, E.B. Kley, "Merging Top-Down and Bottom-Up Approaches to Fabricate Artificial Photonic Nanomaterials with a Deterministic Electric and Magnetic Response," Adv. Funct. Mater. 30 (3), 1905722 (2020).
285 G. Q. Ngo, A. George, R. T. K. Schock, A. Tuniz, E. Najafidehaghani, Z. Y. Gan, N. C. Geib, T. Bucher, H. Knopf, S. Saravi, C. Neumann, T. Luhder, E. P. Schartner, S. C. Warren-Smith, H. Ebendorff-Heidepriem, T. Pertsch, M. A. Schmidt, A. Turchanin, F. Eilenberger, "Scalable Functionalization of Optical Fibers Using Atomically Thin Semiconductors," Adv. Mater. 32 (47), 7 (2020).
284 Y. Sekman, N. Felde, L. Ghazaryan, A. Szeghalmi, S. Schröder, "Light scattering characterization of single-layer nanoporous SiO2 antireflection coating in visible light ," Appl. Optics 59 (5), A143-A149 (2020).
283 M. Franz, R. Junghans, P. Schmitt, A. Szeghalmi, S. E. Schulz, "Wafer-level integration of self-aligned high aspect ratio silicon 3D structures using the MACE method with Au, Pd, Pt, Cu, and Ir," Beilstein J. Nanotechnol. 11, 1439-1449 (2020).
282 P. Paul, K. Pfeiffer, A. Szeghalmi, "Antireflection Coating on PMMA Substrates by Atomic Layer Deposition ," Coatings 10(1), 64 (2020).
281 V. Beladiya, M. Becker, T. Faraz, W. M. M. Kessels, P. Schenk, F. Otto, T. Fritz, M. Grünewald, C. Helbing, K. D. Jandt, A. Tünnermann, M. Sierka, A. Szeghalmi, "Effect of an electric field during the deposition of silicon dioxide thin films by plasma enhanced atomic layer deposition: an experimental and computational study," Nanoscale 12 (3), 2089-2102 (2020).
280 A. Tuniz, O. Bickerton, F.J. Diaz, T. Käsebier, E.B. Kley, S. Kroker, S. Palomba, C.M. de Sterke, "Modular nonlinear hybrid plasmonic circuit," Nat. Commun. 11 (1), 2413 (2020).
279 S. Wengerowsky, S.K. Joshi, F. Steinlechner, J.R. Zichi, B. Liu, T. Scheidl, S.M. Dobrovolskiy, R. van der Molen, J.W.N. Los, V. Zwiller, M.A.M. Versteegh, A. Mura, D. Calonico, M. Inguscio, A. Zeilinger, A. Xuereb, R. Ursin, "Passively stable distribution of polarisation entanglement over 192 km of deployed optical fibre," npj Quantum Inform. 6 (1), 5 (2020).
278 C. Rupprecht, M. Klaas, H. Knopf, T. Taniguchi, K. Watanabe, Y. Qin, S. Tongay, S. Schröder, F. Eilenberger, S. Hofling, C. Schneider, "Demonstration of a polariton step potential by local variation of light-matter coupling in a van-der-Waals heterostructure," Opt. Express 28 (13), 18649-18657 (2020).
277 L.P. Stoevelaar, J. Berzin, F. Silvestri, S. Fasold, K.Z. Kamali, H. Knopf, F. Eilenberger, F. Setzpfandt, S.M.B. Baumer, G. Gerini, T. Pertsch, "Nanostructure-modulated planar high spectral resolution spectro-polarimeter," Opt. Express 28 (14), 19818-19836 (2020).
276 S. Stempfhuber, N. Felde, S. Schwinde, M. Trost, P. Schenk, S. Schröder, A. Tünnermann, "Influence of seed layers on optical properties of aluminum in the UV range," Opt. Express 28 (14), 20324-20333 (2020).
275 T. A. Goebel, M. Heusinger, R. G. Krämer, C. Matzdorf, T. O. Imogore, D. Richter, U. D. Zeitner, S. Nolte, "Femtosecond inscription of semi-aperiodic multi-notch fiber Bragg gratings using a phase mask," Opt. Express 28 (24), 35682-35694 (2020).
274 T. Siefke, C.B.R. Hurtado, J. Dickmann, W. Dickmann, T. Käseberg, J. Meyer, S. Burger, U. Zeitner, B. Bodermann, S. Kroker, "Quasi-bound states in the continuum for deep subwavelength structural information retrieval for DUV nano-optical polarizers," Opt. Express 28 (16), 23122-23132 (2020).
273 N. C. Geib, R. Hollinger, E. Haddad, P. Herrmann, F. Legare, T. Pertsch, C. Spielmann, M. Zürch, F. Eilenberger, "Discrete dispersion scan setup for measuring few-cycle laser pulses in the mid-infrared," Opt. Lett. 45 (18), 5295-5298 (2020).
272 K. Pfeiffer, L. Ghazaryan, U. Schulz, A. Szeghalmi, "Wide-Angle Broadband Antireflection Coatings Prepared by Atomic Layer Deposition," ACS Appl. Mater. Interfaces 11 (24), 21887-21894 (2019).
271 T. Bucher, A. Vaskin, R. Mupparapu, F.J.F. Löchner, A. George, K.E. Chong, S. Fasold, C. Neumann, D.-Y. Choi, F. Eilenberger, F. Setzpfandt, Y.S. Kivshar, T. Pertsch, A. Turchanin, I. Staude, "Tailoring Photoluminescence from MoS2 Monolayers by Mie-Resonant Metasurfaces," ACS Photonics 6 (4), 1002-1009 (2019).
270 L. Ghazaryan, Y. Sekman, S. Schröder, C. Muhlig, I. Stevanovic, R. Botha, M. Aghaee, M. Creatore, A. Tünnermann, A. Szeghalmi, "On the Properties of Nanoporous SiO2 Films for Single Layer Antireflection Coating," Adv. Eng. Mater. 21 (6), 1801229 (2019).
269 K. Dietrich, M. Zilk, M. Steglich, T. Siefke, U. Hübner, T. Pertsch, C. Rockstuhl, A. Tünnermann, E.?B. Kley, "Merging top?down and bottom?up approaches to fabricate artificial photonic nanomaterials with a deterministic electric and magnetic response," Adv. Funct. Mater. 30, 1905722 (2019).
268 M. Shcherbakov, F. Eilenberger, I.Staude, "Interaction of semiconductor metasurfaces with short laser pulses: From nonlinear-optical response toward spatiotemporal shaping," J. Appl. Phys. 126, 085705 (2019).
267 C. Stock, T. Siefke, U. Zeitner, "Metasurface-based patterned wave plates for VIS applications," J. Opt. Soc. Am. B-Opt. Phys. 36 (5), D97-D102 (2019).
266 M. Basset, F. Setzpfandt, F. Steinlechner, E. Beckert, T. Pertsch, M. Gräfe, "Perspectives for Applications of Quantum Imaging," Laser Photon. Rev. 13 (10), 1900097 (2019).
265 A. Gottwald, K. Wiese, T. Siefke, M. Richter, "Validation of thin film TiO2 optical constants by reflectometry and ellipsometry in the VUV spectral range," Meas. Sci. Technol. 30 (4), 045201 (2019).
264 M. Fink, F. Steinlechner, J. Handsteiner, J.P. Dowling, T. Scheidl, R. Ursin, "Entanglement-enhanced optical gyroscope," New J. Phys. 21, 053010 (2019).
263 Y. Chen, M. Fink, F. Steinlechner, J.P. Torres, R. Ursin, "Hong-Ou-Mandel interferometry on a biphoton beat note," npj Quantum Inform. 5, 43 (2019).
262 E. Wong, S. Heist, C. Bräuer-Burchardt, A. Stark, H. Babovsky, R. Kowarschik, "Optimization-based extrinsic calibration of a three-dimensional sensor composed of an array projector and a single camera," Opt. Eng. 58 (10), 104109 (2019).
261 M. Landmann, S. Heist, P. Dietrich, P. Lutzke, I. Gebhart, J. Templin, P. Kühmstedt, A. Tünnermann, G. Notni, "High-speed 3D thermography," Opt. Lasers Eng. 121, 448-455 (2019).
260 B. Sephton, A. Valles, F. Steinlechner, T. Konrad, J.P. Torres, F.S. Roux, A. Forbes, "Spatial mode detection by frequency upconversion," Opt. Lett. 44 (3), 586-589 (2019).
259 D. Gerz, W. Schweinberger, T.P. Butler, T. Siefke, M. Heusinger, T. Amotchkina, V. Pervak, U. Zeitner, I. Pupeza, "Mid-infrared long-pass filter for high-power applications based on grating diffraction," Opt. Lett. 44 (12), 3014-3017 (2019).
258 K. Pfeiffer, W. Dewald, A. Szeghalmi, "Antireflection coating with consistent near-neutral color on complex-shaped substrates prepared by ALD," Opt. Lett. 44 (13), 3270-3273 (2019).
257 T. Butler, D. Gerz, C. Hofer, J. Xu, C. Gaida, T. Heuermann, M. Gebhardt, L. Vamos, W. Schweinberger, J.A. Gessner, T. Siefke, M. Heusinger, U. Zeitner, A. Apolonski, N. Karpowicz, J. Limpert, F. Krausz, I. Pupeza, "Watt-scale 50-MHz source of single-cycle waveform-stable pulses in the molecular fingerprint region," Opt. Lett. 44 (7), 1730-1733 (2019).
256 U. Elu, T. Steinle, D. Sanchez, L. Maidment, K. Zawilski, R. Schunemann, U.D. Zeitner, C. Simon-Boisson, J. Biegert, "Table-top high-energy 7 mu m OPCPA and 260 m Ho:YLF pump laser," Opt. Lett. 44 (13), 3194-3197 (2019).
255 A. Szeghalmi, , "Optical Coatings with Atomic Precision," Photon. Spect. Jun, 78-83 (2019).
254 N. Lundt, M. Klaas, E. Sedov, M. Waldherr, H. Knopf, M. Blei, S. Tongay, S. Klembt, T. Taniguchi, K. Watanabe, U. Schulz, A. Kavokin, S. Höfling, F. Eilenberger, C. Schneider, "Magnetic-field-induced splitting and polarization of monolayer-based valley exciton polaritons," Phys. Rev. B 100, 121303® (2019).
253 S. Ecker, F. Bouchard, L. Bulla, F. Brandt, O. Kohout, F. Steinlechner, R. Fickler, M. Malik, Y. Guryanova, R. Ursin, M. Huber, "Overcoming Noise in Entanglement Distribution," Phys. Rev. X 9 (4), 041042 (2019).
252 T. Faraz, H.C.M. Knoops, M.A. Verheijen, C.A.A. van Helvoirt, S. Karwal, A. Sharma, V. Beladiya, A. Szeghalmi, D.M. Hausmann, J. Henri, M. Creatore, W.M.M. Kessels, "Tuning Material Properties of Oxides and Nitrides by Substrate Biasing during Plasma-Enhanced Atomic Layer Deposition on Planar and 3D Substrate Topographies," ACS Appl. Mater. Interfaces 10 (15), 13158-13180 (2018).
251 R. Müller, L. Ghazaryan, P. Schenk, S. Wolleb, V. Beladiya, F. Otto, N. Kaiser, A. Tünnermann, T. Fritz, A. Szeghalmi, "Growth of Atomic Layer Deposited Ruthenium and Its Optical Properties at Short Wavelengths Using Ru(EtCp)(2) and Oxygen," Coatings 8 (11), 413 (2018).
250 S. Heist, P. Dietrich, M. Landmann, P. Kühmstedt, G. Notni, A. Tünnermann, "GOBO projection for 3D measurements at highest frame rates: a performance analysis," Light-Sci. Appl. 7, 71 (2018).
249 M. Heusinger, D. Michaelis, T. Flügel-Paul, U.D. Zeitner, "Diffuse scattering due to stochastic disturbances of 1D-gratings on the example of line edge roughness," Opt. Express 26 (21), 28104-28118 (2018).
248 S. Heist, C. Zhang, K. Reichwald, P. Kühmstedt, G. Notni, A. Tünnermann, "5D hyperspectral imaging: fast and accurate measurement of surface shape and spectral characteristics using structured light," Opt. Express 26 (18), 23366-23379 (2018).
247 T. Siefke, M. Heusinger, C.B.R. Hurtado, J. Dickmann, U. Zeitner, A. Tünnermann, S. Kroker, "Line-edge roughness as a challenge for high-performance wire grid polarizers in the far ultraviolet and beyond," Opt. Express 26 (15), 19534-19547 (2018).
246 D.K. Lin, H.Y. Chen, Z.K. Liu, K. Dietrich, S. Kroker, T. Kaesebier, Y. Liu, E.B. Kley, Y.L. Hong, "Reducing Rowland ghosts in diffraction gratings by dynamic exposure near-field holography," Opt. Lett. 43 (4), 811-814 (2018).
245 M. Paster, T. Weichelt, "New Illumination Technology for Mask Aligner Lithography," Opt. Photon. 13 (3), 25-27 (2018).
244 G.K. Tadesse, W. Eschen, R. Klas, V. Hilbert, D. Schelle, A. Nathanael, M. Zilk, M. Steinert, F. Schrempel, T. Pertsch, A. Tünnermann, J. Limpert, J. Rothhardt, "High resolution XUV Fourier transform holography on a table top," Scientific Reports 8, 8677 (2018).
243 C. Liu, C. Straif, T. Flügel-Paul, U.D. Zeitner, H. Gross, "Comparison of hyperspectral imaging spectrometer designs and the improvement of system performance with freeform surfaces," Appl. Optics 56 (24), 6894-6901 (2017).
242 S. Shestaeva, A. Bingel, P. Munzert, L. Ghazaryan, C. Patzig, A. Tünnermann, A. Szeghalmi, "Mechanical, structural, and optical properties of PEALD metallic oxides for optical applications," Appl. Optics 56 (4), C47-C59 (2017).
241 G. Kalkowski, K. Grabowski, G. Harnisch, T. Flugel-Paul, U. Zeitner, S. Risse, "Fused silica GRISMs manufactured by hydrophilic direct bonding at moderate heating," Ceas Space Journal 9 (4), 433-440 (2017).
240 K. Pfeiffer, U. Schulz, A. Tünnermann, A. Szeghalmi, "Antireflection Coatings for Strongly Curved Glass Lenses by Atomic Layer Deposition," Coatings 7 (8), 118 (2017).
239 B.N. Tugchin, N. Janunts, M. Steinert, K. Dietrich, E.B. Kley, A. Tünnermann, T. Pertsch, "Quasi-linearly polarized hybrid modes in tapered and metal-coated tips with circular apertures: understanding the functionality of aperture tips," New J. Phys. 19, 063024 (2017).
238 E. Wendler, M. Bischoff, E. Schmidt, F. Schrempel, K. Ellmer, M. Kanis, R. van de Krol, "Ion beam modification of single crystalline BiVO4," Nucl. Instrum. Methods Phys. Res. Sect. B-Beam Interact. Mater. Atoms 409, 133-137 (2017).
237 M. Heusinger, M. Banasch, U.D. Zeitner, "Rowland ghost suppression in high efficiency spectrometer gratings fabricated by e-beam lithography," Opt. Express 25 (6), 6182-6190 (2017).
236 T. Weichelt, Y. Bourgin, U.D. Zeitner, "Mask aligner lithography using laser illumination for versatile pattern generation," Opt. Express 25 (18), 20983-20992 (2017).
235 Y. Bourgin, D. Voigt, T. Käsebier, T. Siefke, E.-B. Kley, U. D. Zeitner , "175??nm period grating fabricated by i-line proximity mask-aligner lithography ," Opt. Lett. 42 (19), 3816-3819 (2017).
234 R. Mac Ciarnain, D. Michaelis, T. Wehlus, A.F. Rausch, N. Danz, A. Brauer, A. Tünnermann, "Emission from outside of the emission layer in state-of-the-art phosphorescent organic light-emitting diodes," Org. Electron. 44, 115-119 (2017).
233 R. Mac Ciarnain, D. Michaelis, T. Wehlus, A.F. Rausch, S. Wehrmeister, T.D. Schmidt, W. Brutting, N. Danz, A. Brauer, A. Tünnermann, "Plasmonic Purcell effect reveals obliquely ordered phosphorescent emitters in Organic LEDs," Scientific Reports 7, 1826 (2017).
232 T. Siefke, S. Kroker, K. Pfeiffer, O. Puffky, K. Dietrich, D.Franta, I. Ohlídal, A. Szeghalmi, E.-B. Kley, A. Tünnermann, "Materials Pushing the Application Limits of Wire Grid Polarizers further into the Deep Ultraviolet Spectral Range," Adv. Opt. Mater. 4 (11), 1780-1786 (2016).
231 M. Steglich, T. Käsebier, E.B. Kley, A. Tünnermann, "Black Germanium fabricated by reactive ion etching," Appl. Phys. A-Mater. Sci. Process. 122 (9), 836 (2016).
230 M. Heusinger, T. Flugel-Paul, U.D. Zeitner, "Large-scale segmentation errors in optical gratings and their unique effect onto optical scattering spectra," Appl. Phys. B-Lasers Opt. 122 (8), 222 (2016).
229 Y.F. Li, H.Y. Chen, S. Kroker, T. Käsebier, Z.K. Liu, K.Q. Qiu, Y. Liu, E.B. Kley, X.D. Xu, Y.L. Hong, S.J. Fu, "Near-field holography enhanced with antireflection coatings-an improved method for fabricating diffraction gratings," Chin. Opt. Lett. 14 (9), 090501 (2016).
228 K. Puthankovilakam, T. Scharf, M. S. Kim, A. Naqavi, H. P. Herzig, T. Weichelt, U. Zeitner, U. Vogler, R. Völkel, "Intensity and phase fields behind phase-shifting masks studied with high-resolution interference microscopy," J. Micro-Nanolithogr. MEMS MOEMS 15 (2), 021203 (2016).
227 S. Bruynooghe, M. Schulze, M. Helgert, M. Challier, D. Tonova, M. Sundermann, T. Koch, A. Gatto, E.B. Kley, "Broadband and wide-angle hybrid antireflection coatings prepared by combining interference multilayers with subwavelength structures," J. Nanophotonics 10 (3), 033002 (2016).
226 T.Weichelt, R. Kinder, U.D. Zeitner, "Photomask displacement technology for continuous profile generation by Mask Aligner Lithography," J. Opt. 18 (12), 125401 (2016).
225 P. Genevée, E. Ahiavi, N. Janunts, T. Pertsch, M. Oliva, E. B. Kley, A. Szeghalmi, "Blistering during the atomic layer deposition of iridium," J. Vac. Sci. Technol. A 34 (1), 01A113 (2016).
224 L. Ghazaryan, E. B. Kley, A. Tünnermann, A. Szeghalmi, "Nanoporous SiO2 thin films made by atomic layer deposition and atomic etching," NanoTechnology 27 (25), 255603 (2016).
223 R. Geiss, A. Sergeyev, H. Hartung, A. S. Solntsev, A. A. Sukhorukov, R. Grange, F. Schrempel, E.-B. Kley, A. Tünnermann, T. Pertsch, "Fabrication of free-standing lithium niobate nanowaveguides down to 50nm in width," NanoTechnology 27 (6), 065301 (2016).
222 A. Bingel, O. Stenzel, P. Naujok, R. Müller, S. Shestaeva, M. Steglich, U. Schulz, N. Kaiser, A. Tünnermann , "AZO/Ag/AZO transparent conductive films: correlation between the structural, electrical, and optical properties and development of an optical model ," Opt. Mater. Express 6(10), 3217-3232 (2016).
221 K. Pfeiffer, S. Shestaeva, A. Bingel, P. Munzert, L. Ghazaryan, C. van Helvoirt, W. M. M. Kessels, U. T. Sanli, C. Grevent, G. Schütz, M. Putkonen, I. Buchanan, L. Jensen, D. Ristau, A. Tünnermann, A. Szeghalmi, "Comparative study of ALD SiO2 thin films for optical applications," Opt. Mater. Express 6 (2), 660-670 (2016).
220 C. Reinlein, C. Damm, N. Lange, A. Kamm, M. Mohaupt, A. Brady, M. Goy, N. Leonhard, R. Eberhardt, U. Zeitner, A. Tünnermann, "Temporally-stable active precision mount for large optics," Opt. Express 24 (12), 13527-13541 (2016).
219 B. N. Tugchin, N. Janunts, M. Steinert, K. Dietrich, D. Sivun, S. Ramachandran, K. V. Nerkararyan, A. Tünnermann, T. Pertsch, "Controlling the excitation of radially polarized conical plasmons in plasmonic tips in liquids," RSC Adv. 6, 53273-53281 (2016).
218 A. Bingel, M. Steglich, P. Naujok, R. Müller, U. Schulz, N. Kaiser, A. Tünnermann, "Influence of the ZnO:Al dispersion on the performance of ZnO:Al/Ag/ZnO:Al transparent electrodes," Thin Solid Films 616, 594-600 (2016).
217 A. Sergeyev, R. Geiss, A. S. Solntsev, A. A. Sukhorukov, F. Schrempel, T. Pertsch, R. Grange, "Enhancing Guided Second-Harmonic Light in Lithium Niobate Nanowires," ACS Photonics 2 (6), 687-691 (2015).
216 B. N. Tugchin, N. Janunts, A. E. Klein, M. Steinert, S. Fasold, S. Diziain, M. Sison, E.-B. Kley, A. Tünnermann, T. Pertsch, "Plasmonic Tip Based on Excitation of Radially Polarized Conical Surface Plasmon Polariton for Detecting Longitudinal and Transversal Fields," ACS Photonics 2 (10), 1468-1475 (2015).
215 R. Alaee, D. Lehr, R. Filter, F. Lederer, E.-B. Kley, C. Rockstuhl, A. Tünnermann, "Scattering Dark States in Multiresonant Concentric Plasmonic Nanorings," ACS Photonics 2 (8), 1085-1090 (2015).
214 M. Otto, M. Algasinger, H. Branz, B. Gesemann, T. Gimpel, K. Füchsel, T. Käsebier, S. Kontermann, S. Koynov, X. Li, V. Naumann, J. Oh, A. N. Sprafke, J. Ziegler, M. Zilk, R. B. Wehrspohn , "Black Silicon Photovoltaics," Adv. Opt. Mater. 3 (2), 147-164 (2015).
213 M. Beier, J. Hartung, T. Peschel, C. Damm, A. Gebhardt, S. Scheiding, D. Stumpf, U. D. Zeitner, S. Risse, R. Eberhardt, A. Tünnermann, "Development, fabrication, and testing of an anamorphic imaging snap-together freeform telescope," Appl. Optics 54 (12), 3530-3542 (2015).
212 M. Steglich, M. Oehme, T. Käsebier, M. Zilk, K. Kostecki, E.-B. Kley, J. Schulze, A. Tünnermann, "Ge-on-Si photodiode with black silicon boosted responsivity," Appl. Phys. Lett. 107 (5), 051103 (2015).
211 S. Leavey, B. W. Barr, A. S. Bell, N. Gordon, C. Graef, S. Hild, S. H. Huttner, E.-B. Kley, S. Kroker, J. Macarthur, C. Messenger, M. Pitkin, B. Sorazu, K. Strain, A. Tünnermann, "Upper limit to the transverse to longitudinal motion coupling of a waveguide mirror," Class. Quantum Gravity 32 (17), 175005 (2015).
210 S. Kroker, R. Nawrodt, "The Einstein Telescope," IEEE Instrum. Meas. Mag. 18(3), 4-8 (2015).
209 M. Steglich, T. Käsebier, F. Schrempel, E.-B. Kley, A. Tünnermann, "Self-organized, effective medium Black Silicon for infrared antireflection," Infrared Phys. Technol. 69, 218-221 (2015).
208 T. Weichelt, L. Stürzebecher, U. D. Zeitner, "Optimized lithography process for through-silicon vias-fabrication using a double-sided (structured) photomask for mask aligner lithography," J. Micro-Nanolithogr. MEMS MOEMS 14 (3), 034501 (2015).
207 R. Geiss, J. Brandt, H. Hartung, A. Tünnermann, T. Pertsch, E.-B. Kley, F. Schrempel, "Photonic microstructures in lithium niobate by potassium hydroxide-assisted ion beam-enhanced etching," J. Vac. Sci. Technol. B 33 (1), 010601 (2015).
206 S. Ratzsch, E.-B. Kley, A. Tünnermann, A. Szeghalmi, "Inhibition of Crystal Growth during Plasma Enhanced Atomic Layer Deposition by Applying BIAS," Materials 8 (11), 7805-7812 (2015).
205 L. Stürzebecher, F. Fuchs, U.D. Zeitner, A. Tünnermann, "High resolution proximity lithography for nano-optical components," Microelectron. Eng. 132, 120-134 (2015).
204 D. Lehr, J. Reinhold, I. Thiele, H. Hartung, K. Dietrich, C. Menzel, T. Pertsch, E.-B. Kley, A. Tünnermann, "Enhancing Second Harmonic Generation in Gold Nanoring Resonators Filled with Lithium Niobate," Nano Lett. 15 (2), 1025?1030 (2015).
203 R. Geiss, A. Sergeyev, H. Hartung, A. Solntsev, A. Sukhorukov, R. Grange, F. Schrempel, E.-B. Kley, A. Tünnermann, T. Pertsch, "Fabrication of free-standing lithium niobate nanowaveguides down to 50 nm in width," NanoTechnology 27, 065301 (2015).
202 S. Ratzsch, E.-B. Kley, A. Tünnermann, A. Szeghalmi, "Influence of the oxygen plasma parameters on the atomic layer deposition of titanium dioxide," NanoTechnology 26 (2), 024003 (2015).
201 T. Paul, A. Matthes, T. Harzendorf, S. Ratzsch, U.D. Zeitner , "Half-wave phase retarder working in transmission around 630nm realized by atomic layer deposition of sub-wavelength gratings," Opt. Mater. Express 5, 124-129 (2015).
200 S. Ratzsch, E.-B. Kley, A. Tünnermann, A. Szeghalmi, "Encapsulation process for diffraction gratings.," Opt. Express 23 (14), 17955-65 (2015).
199 Y. Bourgin, T. Siefke, T. Käsebier, P. Genevee, A. Szeghalmi, E.-B. Kley, U. D. Zeitner, "Double-sided structured mask for sub-micron resolution proximity i-line mask-aligner lithography," Opt. Express 23 (13), 16628-37 (2015).
198 M. Meinders, S. Kroker, A. P. Singh, E.-B. Kley, A. Tünnermann, K. Danzmann, R. Schnabel, "Cancellation of lateral displacement noise of three-port gratings for coupling light to cavities.," Opt. Lett. 40 (9), 2053-2055 (2015).
197 R. Alaee, R. Filter, D. Lehr, F. Lederer, C. Rockstuhl , "A generalized Kerker condition for highly directive nanoantennas ," Opt. Lett. 40 (11), 2645-2648 (2015).
196 R. Geiss, S. Saravi, A. Sergeyev, S. Diziain, F. Setzpfandt, F. Schrempel, R. Grange, E.-B. Kley, A. Tünnermann, T. Pertsch, "Fabrication of nanoscale lithium niobate waveguides for second-harmonic generation," Opt. Lett. 40 (12), 2715-2718 (2015).
195 O. Stenzel, S. Wilbrandt, X. Chen, R. Schlegel, L. Coriand, A. Duparré, U. Zeitner, T. Benkenstein, C. Wächter, "Observation of the waveguide resonance in a periodically patterned high refractive index broadband antireflection coating," Appl. Optics 53 (14), 3147-3156 (2014).
194 T. Weber, S. Kroker, T. Käsebier, E.-B. Kley, A. Tünnermann, "Silicon wire grid polarizer for ultraviolet applications," Appl. Optics 53 (34), 8140-8144 (2014).
193 D. Stumpf, U.D. Zeitner, "Extending standard mask lithography exposure technique to spherical surfaces," Appl. Phys. B-Lasers Opt. 115 (3), 371-377 (2014).
192 D. Lehr, R. Alaee, R. Filter, K. Dietrich, T. Siefke, C. Rockstuhl, F. Lederer, E.-B. Kley, A. Tünnermann, "Plasmonic nanoring fabrication tuned to pitch: Efficient, deterministic, and large scale realization of ultra-small gaps for next generation plasmonic devices," Appl. Phys. Lett. 105 (14), 143110 (2014).
191 K. Dietrich, C. Menzel, D. Lehr, O. Puffky, U. Hübner, T. Pertsch, A. Tünnermann, E.-B. Kley, "Elevating optical activity: Efficient on-edge lithography of three-dimensional starfish metamaterial," Appl. Phys. Lett. 104, 193107 (2014).
190 S. P. Scheeler, D. Lehr, E.-B. Kley, C. Pacholski, "Top-up fabrication of gold nanorings.," Chem.-Asian J. 9 (8), 2072-2076 (2014).
189 A. Cumming, L. Cunningham, G.D. Hammond, K. Haughian, J. Hough, S. Kroker, I. W. Martin, R. Nawrodt, S. Rowan, C. Schwarz, A. A. van Veggel, "Silicon mirror suspensions for gravitational wave detectors ," Class. Quantum Gravity 31, 025017 (2014).
188 M. Steglich, T. Käsebier, M. Zilk, T. Pertsch, E.-B. Kley, A. Tünnermann, "The structural and optical properties of black silicon by inductively coupled plasma reactive ion etching," J. Appl. Phys. 116 (17), 173503 (2014).
187 M. Steglich, D. Lehr, S. Ratzsch, T. Käsebier, F. Schrempel, E.-B. Kley, A. Tünnermann, "An ultra-black silicon absorber," Laser Photon. Rev. 8 (2), L13-L17 (2014).
186 K. Keskinbora, A.-L. Robisch, M. Mayer, U. T. Sanli, C. Grevent, C. Wolter, M. Weigand, A. Szeghalmi, M. Knez, T. Salditt, G. Schutz, "Multilayer Fresnel zone plates for high energy radiation resolve 21 nm features at 1.2 keV.," Opt. Express 22 (15), 18440-18453 (2014).
185 T. Weichelt, U. Vogler, L. Stürzebecher, R. Völkel, U.D. Zeitner, "Resolution enhancement for advanced mask aligner lithography using phase shifting photomasks," Opt. Express 22, 16310-16321 (2014).
184 L. Stürzebecher, F. Fuchs, T. Harzendorf, U.D. Zeitner, "Pulse compression grating fabrication by diffractive proximity photolithography," Opt. Lett. 39 (4), 1042 - 1045 (2014).
183 T. Siefke, D. Lehr, T. Weber, D. Voigt, E.-B. Kley, A. Tünnermann, "Fabrication influences on deep-ultraviolet tungsten wire grid polarizers manufactured by double patterning," Opt. Lett. 39 (22), 6434-6437 (2014).
182 Y. Bourgin, T. Kasebier, U. D. Zeitner, "250nm period grating transferred by proximity i-line mask-aligner lithography.," Opt. Lett. 39 (6), 1665-8 (2014).
181 Y. Bourgin, T. Käsebier, U.D. Zeitner, "250nm period grating transferred by proximity i-line mask-aligner lithography," Opt. Lett. 39 (6), 1665 (2014).
180 R. Geiss, S. Diziain, M. Steinert, F. Schrempel, E.-B. Kley, A. Tünnermann, T. Pertsch, "Photonic crystals in lithium niobate by combining focussed ion beam writing and ion-beam enhanced etching," Phys. Status Solidi A-Appl. Mat. 211 (10), 2421-2425 (2014).
179 A. Bingel, K. Füchsel, N. Kaiser, A. Tünnermann, "ZnO:Al films prepared by inline DC magnetron sputtering," Adv. Opt. Technol. 3 (1), 103?111 (2013).
178 M. Steglich, C. Patzig, L. Berthold, F. Schrempel, K. Füchsel, T. Höche, E. B. Kley, A. Tünnermann, "Heteroepitaxial Ge-on-Si by DC magnetron sputtering," AIP Adv. 3 (7), (2013).
177 C. Schmidt, A. Chipouline, T. Käsebier, E. B. Kley, A. Tünnermann, T. Pertsch, "Differential all-optical tuning of eigenmodes in coupled microdisks," Appl. Phys. Lett. 103 (4), 041115 (2013).
176 M. Oliva, D. Michaelis, F. Fuchs, A. Tünnermann, U. D. Zeitner, "Highly efficient broadband blazed grating in resonance domain," Appl. Phys. Lett. 102 (20), 203114 (2013).
175 M. Steglich, M. Zilk, F. Schrempel, A. Tünnermann, E.-B. Kley, "Improvement of Ge-on-Si photodiodes by black silicon trapping," Appl. Phys. Lett. 102, 111110 (2013).
174 S. Diziain, R. Geiss, M. Zilk, F. Schrempel, E. B. Kley, A. Tünnermann, T. Pertsch, "Second harmonic generation in free-standing lithium niobate photonic crystal L3 cavity," Appl. Phys. Lett. 103 (5), 051117 (2013).
173 S. Kroker, T. Käsebier, S. Steiner, E. B. Kley, A. Tünnermann, "High efficiency two-dimensional grating reflectors with angularly tunable polarization efficiency," Appl. Phys. Lett. 102 (16), 161111 (2013).
172 M. Steglich, T. Käsebier, I. Höger, K. Füchsel, A. Tünnermann, E.-B. Kley, "Black Silicon nanostructures on silicon thin films prepared by reactive ion etching," Chin. Opt. Lett. 11, S10502 (2013).
171 R. Nawrodt, C. Schwarz, S. Kroker, I. W. Martin, R. Bassiri, F. Brückner, L. Cunningham, G. D. Hammond, D. Heinert, J. Hough, T. Käsebier, E. B. Kley, R. Neubert, S. Reid, S. Rowan, P. Seidel, A. Tünnermann, "Investigation of mechanical losses of thin silicon flexures at low temperatures," Class. Quantum Gravity 30 (11), 115008 (2013).
170 M. Steglich, M. Zilk, A. Bingel, C. Patzig, T. Käsebier, F. Schrempel, E.-B. Kley, A. Tünnermann, "A normal-incidence PtSi photoemissive detector with black silicon light-trapping," J. Appl. Phys. 114, 183102 (2013).
169 L. Ghazaryan, E. B. Kley, A. Tünnermann, A. V. Szeghalmi, "Stability and annealing of alucones and alucone alloys," J. Vac. Sci. Technol. A 31 (1), 01A149 (2013).
168 G. Kalkowski, T. Benkenstein, C. Rothhardt, F. Fuchs, U. D. Zeitner, "Direct bonding for the encapsulation of transverse optical gratings," Microelectron. Eng. 110, 302-306 (2013).
167 T. W. H. Oates, B. Dastmalchi, C. Helgert, L. Reissmann, U. Hübner, E. B. Kley, M. A. Verschuuren, I. Bergmair, T. Pertsch, K. Hingerl, K. Hinrichs, "Optical activity in sub-wavelength metallic grids and fishnet metamaterials in the conical mount," Opt. Mater. Express 3 (4), 439-451 (2013).
166 A. Sergeyev, R. Geiss, A. S. Solntsev, A. Steinbrück, F. Schrempel, E. B. Kley, T. Pertsch, R. Grange, "Second-harmonic generation in lithium niobate nanowires for local fluorescence excitation," Opt. Express 21 (16), 19012-19021 (2013).
165 H. C. Eckstein, U. D. Zeitner, "Modeling electro-optical characteristics of broad area semiconductor lasers based on a quasi-stationary multimode analysis," Opt. Express 21 (20), 23231-23240 (2013).
164 M. Trost, S. Schroder, A. Duparre, S. Risse, T. Feigl, U. D. Zeitner, A. Tünnermann, "Structured Mo/Si multilayers for IR-suppression in laser-produced EUV light sources," Opt. Express 21 (23), 27852-27864 (2013).
163 W. Eckstein, E. B. Kley, A. Tünnermann, "Comparison of different simulation methods for effective medium computer generated holograms," Opt. Express 21 (10), 12424-12433 (2013).
162 C. Eckstein, U. Zeitner, A. Tünnermann, U. Strauss, W. Schmid, C. Lauer, "Mode shaping in semiconductor broad area lasers by monolithically integrated phase structures," Opt. Lett. 38 (21), 4480-4482 (2013).
161 S. Kroker, T. Käsebier, E. B. Kley, A. Tünnermann, "Coupled grating reflectors with highly angular tolerant reflectance," Opt. Lett. 38 (17), 3336-3339 (2013).
160 D. Heinert, S. Kroker, D. Friedrich, S. Hild, E. B. Kley, S. Leavey, I. W. Martin, R. Nawrodt, A. Tünnermann, S. P. Vyatchanin, K. Yamamoto, "Calculation of thermal noise in grating reflectors," Phys. Rev. D 88 (4), 042001 (2013).
159 B. Walther, C. Helgert, C. Rockstuhl, F. Setzpfandt, F. Eilenberger, E.-B. Kley, F. Lederer, A. Tünnermann,T. Pertsch, "Spatial and spectral light shaping with metamaterials," Adv. Mater. 24 (47), 6300-6304 (2012).
158 K. Dietrich, D. Lehr, C. Helgert, A. Tünnermann, E.-B. Kley, "Circular Dichroism from Chiral Nanomaterial Fabricated by On-Edge Lithography," Adv. Mater. 24 (44), OP321-OP325 (2012).
157 C. Pacholski, C. Morhard, J. P. Spatz, D. Lehr, M. Schulze, E.-B. Kley, A. Tünnermann, M. Helgert, M. Sundermann, R. Brunner, "Antireflective subwavelength structures on microlens arrays-comparison of various manufacturing techniques," Appl. Optics 51 (1), 8-14 (2012).
156 T. Weber, T. Käsebier, M. Helgert, E.-B. Kley, A. Tünnermann, "Tungsten wire grid polarizer for applications in the DUV spectral range," Appl. Optics 51 (16), 3224-3227 (2012).
155 U.D. Zeitner, M. Oliva, F. Fuchs, D. Michaelis, T. Benkenstein, T. Harzendorf, E.-B. Kley, "High-performance diffraction gratings made by e-beam lithography," Appl. Phys. A-Mater. Sci. Process. 109 (4), 789-796 (2012).
154 B. Sathyaprakash, E.-B. Kley, S. Kroker, K. Yamamoto, et. al., "Scientific objectives of Einstein Telescope," Class. Quantum Gravity 29, 124013 (2012).
153 Y. Jourlin, S. Tonchev, O. Parriaux, J. Sauvage-Vincent, T. Harzendorf, U. Zeitner, "Waveguide Grating Radial Polarizer for the Photolithography of Circularly Symmetrical Optical Elements," IEEE Photonics J. 4, 1728-1736 (2012).
152 F. Burmeister, S. Steenhusen, R. Houbertz, U. D. Zeitner, S. Nolte, A. Tünnermann, "Materials and technologies for fabrication of three-dimensional microstructures with sub-100 nm feature sizes by two-photon polymerization," J. Laser Appl. 24(4), 042014 (2012).
151 M. Oliva, D. Michaelis, P. Dannberg, M. Jozwik, K. Lizewski, M. Kujawinska, U.D. Zeitner, "Twyman-Green-type integrated laser interferometer array for parallel MEMS testing," J. Microelectromech. Syst. 22, 015018 (2012).
150 M. Losurdo, I. Bergmair, M.M. Giangregorio, B. Dastmalchi, G.V. Bianco, C. Helgert, E. Pshenay-Severin, M. Falkner, T. Pertsch, E.-B. Kley, U. Hübner, M.A. Verschuuren, M. Mühlberger, K. Hingerl, G. Bruno, "Enhancing chemical and optical stability of Silver nanostructures by low-temperature Hydrogen atoms processing," J. Phys. Chem. C 116 (43), 23004-23012 (2012).
149 S. Babin, G. Glushenko, T. Weber, T. Käsebier, A. Szeghalmi, E.-B. Kley, "Application of double patterning technology to fabricate optical elements: Process simulation, fabrication, and measurement," J. Vac. Sci. Technol. B 30, 031605 (2012).
148 S. Richter, A. Plech, M. Steinert, M. Heinrich, S. Döring, F. Zimmermann, U. Peschel, E.-B. Kley, A. Tünnermann, S. Nolte, "On the fundamental structure of femtosecond laser-induced nanogratings," Laser Photon. Rev. 6 (6), 787-792 (2012).
147 C. Helgert, K. Dietrich, D. Lehr, T. Käsebier, T. Pertsch, E.-B. Kley, "A dedicated multilayer technique for the fabrication of three-dimensional metallic nanoparticles," Microelectron. Eng. 97, 181-184 (2012).
146 G. Kalkowski, U. Zeitner, T. Benkenstein, J. Fuchs, C. Rothhardt, R. Eberhardt, "Direct wafer bonding for encapsulation of fused silica optical gratings," Microelectron. Eng. 97, 177-180 (2012).
145 T. Weber, T. Käsebier, A. Szeghalmi, M. Knez, E.-B. Kley, A. Tünnermann, "High aspect ratio deep UV wire grid polarizer fabricated by double patterning," Microelectron. Eng. 98, 433-435 (2012).
144 I. Bergmair, W. Hackl, M. Losurdo, C. Helgert, G. Isic, M. Rohn, M. M. Jakovljevic, T. Mueller, M. Giangregorio, E.-B. Kley, T. Fromherz, R. Gajic, T. Pertsch, G. Bruno, M. Muehlberger, "Nano- and microstructuring of graphene using UV-NIL," NanoTechnology 23, 335301 (2012).
143 A. Szameit, Y. Shechtman, E. Osherovich, E. Bullkich, P. Sidorenko, H. Dana, S. Steiner, E.-B. Kley, S. Gazit, T. Cohen-Hyams, S. Shoham, M. Zibulevsky, I. Yavneh, Y. C. Eldar, O. Cohen, M. Segev, "Sparsity-based single-shot subwavelength coherent diffractive imaging," Nat. Mater. 11 (5), 455-459 (2012).
142 C. Braig, L. Fritzsch, T. Käsebier, E. B. Kley, C. Laubis, Y. Liu, F. Scholze, A. Tünnermann, "An EUV beamsplitter based on conical grazing incidence diffraction," Opt. Express 20 (2), 1825-1838 (2012).
141 F. Burmeister, U.D. Zeitner, S. Nolte, A. Tünnermann, "High numerical aperture hybrid optics for two-photon polymerization," Opt. Express 20 (7), 7994-8005 (2012).
140 M. Britzger, M. H. Wimmer, A. Khalaidovski, D. Friedrich, S. Kroker, F. Brückner, E.-B. Kley, A. Tünnermann, K. Danzmann, R. Schnabel, "Michelson interferometer with diffractively-coupled arm resonators in second-order Littrow configuration," Opt. Express 20 (23), 25400-25408 (2012).
139 M. Schulze, M. Damm, M. Helgert, E.-B. Kley, S. Nolte, A. Tünnermann, "Durability of stochastic antireflective structures - analyses on damage thresholds and adsorbate elimination," Opt. Express 20 (16), 18348-18355 (2012).
138 S. Steiner, S. Kroker, T. Käsebier, E.-B. Kley, A. Tünnermann, "Angular bandpass filters based on dielectric resonant waveguide gratings," Opt. Express 20 (20), 22555-22562 (2012).
137 T. W. H. Oates, B. Dastmalchi, G. Isic, S. Tollabimazraehno, C. Helgert, T. Pertsch, E.-B. Kley, M. A. Verschuuren, I. Bergmair, K. Hingerl , "Oblique incidence ellipsometric characterization and the substrate dependence of visible frequency fishnet metamaterials," Opt. Express 20 (10), 11166-11177 (2012).
136 D. Lehr, K. Dietrich, C. Helgert, T. Käsebier, H.-J. Fuchs, A. Tünnermann, E.-B. Kley, "Plasmonic properties of aluminum nanorings generated by double patterning," Opt. Lett. 37 (2), 157-159 (2012).
135 M. Britzger, A. Khalaidovski, B. Hemb, E. B. Kley, F. Brückner, R. H. Rinkleff, K. Danzmann, R. Schnabel, "External-cavity diode laser in second-order Littrow configuration," Opt. Lett. 37 (15), 3117-3119 (2012).
134 C. Schmidt, M. Liebsch, A. E. Klein, N. Janunts, A. Chipouline, T. Käsebier, C. Etrich, F. Lederer, E.-B. Kley, A. Tünnermann, T. Pertsch, "Near-field mapping of optical eigenstates in coupled disk microresonators," Phys. Rev. A 85, 033827 (2012).
133 J. Reinhold, M. R. Shcherbakov, A. Chipouline, V. I. Panov, C. Helgert, T. Paul, C. Rockstuhl, F. Lederer, E.-B. Kley, A. Tünnermann, A.A. Fedyanin, T. Pertsch, "Contribution of the magnetic resonance to the third harmonic generation from a fishnet metamaterial," Phys. Rev. B 86, 115401 (2012).
132 M. Britzger, D. Friedrich, S. Kroker, F. Brückner, O. Burmeister, E.-B. Kley, A. Tünnermann, K. Danzmann, R. Schnabel, "Pound-Drever-Hall error signals for the length control of three-port grating coupled cavities," Appl. Optics 50 (22), 4340-4346 (2011).
131 C. Helgert, C. Rockstuhl, C. Etrich, E. B. Kley, A. Tünnermann, F. Lederer, T. Pertsch, "Effects of anisotropic disorder in an optical metamaterial," Appl. Phys. A-Mater. Sci. Process. 103 (3), 591-595 (2011).
130 C. Kern, M. Zuerch, J. Petschulat, T. Pertsch, B. Kley, T. Käsebier, U. Hübner, C. Spielmann, "Comparison of femtosecond laser-induced damage on unstructured vs. nano-structured Au-targets," Appl. Phys. A-Mater. Sci. Process. 104 (1), 15-21 (2011).
129 C. Schmidt, A. Chipouline, T. Käsebier, E. B. Kley, A. Tünnermann, T. Pertsch, "Temperature induced nonlinearity in coupled microresonators," Appl. Phys. A-Mater. Sci. Process. 104 (3), 503-511 (2011).
128 C. Helgert, E. Pshenay-Severin, M. Falkner, C. Menzel, C. Rockstuhl, E.-B. Kley, A. Tünnermann, F. Lederer, T. Pertsch, "Chiral Metamaterial Composed of Three-Dimensional Plasmonic Nanostructures," Nano Lett. 11 (10), 4400-4404 (2011).
127 T. Weber, T. Käsebier, A. Szeghalmi, M. Knez, E.-B. Kley, A. Tünnermann, , "Iridium wire grid polarizer fabricated using atomic layer deposition," Nanoscale Res. Lett. 6, 558 (2011).
126 I. Bergmair, B. Dastmalchi, M. Bergmair, A. Saeed, W. Hilber, G. Hesser, C. Helgert, E. Pshenay-Severin, T. Pertsch, E. B. Kley, U. Hübner, N. H. Shen, R. Penciu, M. Kafesaki, C. M. Soukoulis, K. Hingerl, M. Muehlberger, R. Schoeftner, "Single and multilayer metamaterials fabricated by nanoimprint lithography," NanoTechnology 22 (32), 325301 (2011).
125 I. Bergmair, B. Dastmalchi, M. Bergmair, A. Saeed, W. Hilber, G. Hesser, C. Helgert, E. Pshenay-Severin, T. Pertsch, E.-B. Kley, U. Hübner, N.H. Shen, R. Penciu, M. Kafesaki, C.M. Soukoulis, K. Hingerl, M. Mühlberger, R. Schoeftner, "Metamaterials fabricated by Nanoimprint Lithography," NanoTechnology 22, 325301 (2011).
124 C. Braig, P. Predehl, E.-B. Kley, "Efficient extreme ultraviolet transmission gratings for plasma diagnostics," Opt. Eng. 50 (6), 66501 (2011).
123 C. Braig, T. Käsebier, E. B. Kley, A. Tünnermann, "Stand-alone diamond binary phase transmission gratings for the EUV band," Opt. Express 19 (15), 14008-14017 (2011).
122 D. Friedrich, B. W. Barr, F. Brückner, S. Hild, J. Nelson, J. Macarthur, M. V. Plissi, M. P. Edgar, S. H. Huttner, B. Sorazu, S. Kroker, M. Britzger, E.-B. Kley, K. Danzmann, A. Tünnermann, K. A. Strain, R. Schnabel, "Waveguide grating mirror in a fully suspended 10 meter Fabry-Perot cavity," Opt. Express 19 (16), 14955-14963 (2011).
121 M. Britzger, D. Friedrich, S. Kroker, F. Brückner, O. Burmeister, E.-B. Kley, A. Tünnermann, K. Danzmann, R. Schnabel, "Diffractively coupled Fabry-Perot resonator with power-recycling," Opt. Express 19 (16), 14964-14975 (2011).
120 M. Oliva, T. Harzendorf, D. Michaelis, U. D. Zeitner, A. Tünnermann, "Multilevel blazed gratings in resonance domain: an alternative to the classical fabrication approach," Opt. Express 19 (15), 14735-14745 (2011).
119 S. Kroker, T. Käsebier, F. Brückner, F. Fuchs, E.-B. Kley, A. Tünnermann, "Reflective cavity couplers based on resonant waveguide gratings," Opt. Express 19 (17), 16466-16479 (2011).
118 W. Freese, T. Kämpfe, W. Rockstroh, E.-B. Kley, A. Tünnermann, "Optimized electron beam writing strategy for fabricating computer-generated holograms based on an effective medium approach," Opt. Express 19 (9), 8684-8692 (2011).
117 Y.-Y. Yang, F. Suessmann, S. Zherebtsov, I. Pupeza, J. Kaster, D. Lehr, H.-J. Fuchs, E.-B. Kley, E. Fill, X.-M. Duan, Z.-S. Zhao, F. Krausz, S. L. Stebbings, M. F. Kling, "Optimization and characterization of a highly-efficient diffraction nanograting for MHz XUV pulses," Opt. Express 19 (3), 1954-1962 (2011).
116 B. W. Barr, M. P. Edgar, J. Nelson, M. V. Plissi, S. H. Huttner, B. Sorazu, K. A. Strain, O. Burmeister, M. Britzger, D. Friedrich, R. Schnabel, K. Danzmann, J. Hallam, A. Freise, T. Clausnitzer, F. Brückner, E. B. Kley, A. Tünnermann, "Translational, rotational, and vibrational coupling into phase in diffractively coupled optical cavities," Opt. Lett. 36 (14), 2746-2748 (2011).
115 F. Brückner, S. Kroker, D. Friedrich, E.-B. Kley, A. Tünnermann, "Widely tunable monolithic narrowband grating filter for near-infrared radiation," Opt. Lett. 36 (4), 436-438 (2011).
114 G. Andriukaitis, D. Kartashov, D. Lorenc, A. Pugzlys, A. Baltuska, L. Giniunas, R. Danielius, J. Limpert, T. Clausnitzer, E. B. Kley, A. Voronin, A. Zheltikov, "Hollow-fiber compression of 6 mJ pulses from a continuous-wave diode-pumped single-stage Yb, Na:CaF(2) chirped pulse amplifier," Opt. Lett. 36 (10), 1914-1916 (2011).
113 M. Schulze, D. Lehr, M. Helgert, E.-B. Kley, A. Tünnermann, "Transmission enhanced optical lenses with self-organized antireflective subwavelength structures for the UV range," Opt. Lett. 36 (19), 3924-3926 (2011).
112 S. Kroker, F. Brückner, E.-B. Kley, A. Tünnermann, "Enhanced angular tolerance of resonant waveguide grating reflectors," Opt. Lett. 36 (4), 537-539 (2011).
111 T. Weber, T. Käsebier, E.-B. Kley, A. Tünnermann, "Broadband iridium wire grid polarizer for UV applications," Opt. Lett. 36 (4), 445-447 (2011).
110 M. Mayer, C. Grevent, A. Szeghalmi, M. Knez, M. Weigand, S. Rehbein, G. Schneider, B. Baretzky, G. Schütz, "Multilayer Fresnel zone plate for soft X-ray microscopy resolves sub 39-nm structures," UltraMicroscopy 111, 1706-1711 (2011).
109 Y. Liu, H.-J. Fuchs, Z. Liu, H. Chen, S. He, S. Fu, E.-B. Kley, A. Tünnermann, "Investigation on the properties of a laminar grating as a soft x-ray beam splitter," Appl. Optics 49 (23), 4450-4459 (2010).
108 R. Geiss, S. Diziain, R. Iliew, C. Etrich, H. Hartung, N. Janunts, F. Schrempel, F. Lederer, T. Pertsch, E. B. Kley, "Light propagation in a free-standing lithium niobate photonic crystal waveguide," Appl. Phys. B-Lasers Opt. 97 (13), 131109 (2010).
107 M. P. Edgar, B. W. Barr, J. Nelson, M. V. Plissi, K. A. Strain, O. Burmeister, M. Britzger, K. Danzmann, R. Schnabel, T. Clausnitzer, F. Brückner, E.-B. Kley, A. Tünnermann, "Experimental demonstration of a suspended, diffractively coupled Fabry-Perot cavity," ChemPhysChem 27 (8), (2010).
106 A. Szeghalmi, E. B. Kley, M. Knez, "Theoretical and Experimental Analysis of the Sensitivity of Guided Mode Resonance Sensors," J. Non-Cryst. Solids 114 (49), 21150-21157 (2010).
105 I. Bergmair, M. Muehlberger, K. Hingerl, E. Pshenay-Severin, T. Pertsch, E. B. Kley, H. Schmidt, R. Schoeftner, "3D materials made of gold using Nanoimprint Lithography," Microelectron. Eng. 87 (5-8), 1008-1010 (2010).
104 H. Hartung, E.-B. Kley, T. Gischkat, F. Schrempel, W. Wesch, A. Tünnermann, "Ultra thin high index contrast photonic crystal slabs in lithium niobate," Opt. Mater. 33 (1), 19-21 (2010).
103 L. Stürzebecher, T. Harzendorf, U. Vogler, U.D. Zeitner, R. Voelkel, "Advanced mask aligner lithography: fabrication of periodic patterns using pinhole array mask and Talbot effect," Opt. Express 18, 19485-19494 (2010).
102 R. Voelkel, U. Vogler, A. Bich, P. Pernet, K.J. Weible, M. Hornung, R. Zoberbier, E. Cullmann, L. Stürzebecher, T. Harzendorf, U.D. Zeitner, "Advanced Mask Aligner Lithography: New Illumination System," Opt. Express 18, 20968-20978 (2010).
101 C. Schmidt, A. Chipouline, T. Käsebier, E.-B. Kley, A. Tünnermann, T. Pertsch, "Thermal nonlinear effects in hybrid silica/polymer microdisks," Opt. Lett. 35 (20), 3351-3353 (2010).
100 J. Petschulat, C. Helgert, M. Steinert, N. Bergner, C. Rockstuhl, F. Lederer, T. Pertsch, A. Tünnermann, E.-B. Kley, "Plasmonic modes of extreme subwavelength nanocavities," Opt. Lett. 35 (16), 2693-2695 (2010).
99 W. Freese, T. Kämpfe, E.-B. Kley, A. Tünnermann, "Design of binary subwavelength multiphase level computer generated holograms," Opt. Lett. 35 (5), 676-678 (2010).
98 C. Menzel, C. Helgert, C. Rockstuhl, E. B. Kley, A. Tünnermann, T. Pertsch, F. Lederer, "Asymmetric Transmission of Linearly Polarized Light at Optical Metamaterials," Phys. Rev. Lett. 104 (25), 253902 (2010).
97 F. Brückner, D. Friedrich, T. Clausnitzer, M. Britzger, O. Burmeister, K. Danzmann, E.-B. Kley, A. Tünnermann, and R. Schnabel, "Realization of a Monolithic High-Reflectivity Cavity Mirror from a Single Silicon Crystal," Phys. Rev. Lett. 104 (16), (2010).
96 C. Menzel, C. Helgert, J. Uepping, C. Rockstuhl, E. B. Kley, R. B. Wehrspohn, T. Pertsch, F. Lederer, "Angular resolved effective optical properties of a Swiss cross metamaterial," Appl. Phys. B-Lasers Opt. 95 (13), 131104 (2009).
95 S. Babin, A. Bugrov, S. Cabrini, S. Dhuey, A. Goltsov, I. Ivonin, E. B. Kley, C. Peroz, H. Schmidt, V. Yankov, "Digital optical spectrometer-on-chip," Appl. Phys. B-Lasers Opt. 95 (4), (2009).
94 S. Babin, C. Peroz, A. Bugrov, A. Goltsov, I. Ivonin, V. Yankov, S. Dhuey, S. Cabrini, E. B. Kley, H. Schmidt, "Fabrication of novel digital optical spectrometer on chip," J. Opt. Soc. Am. B-Opt. Phys. 27 (6), 3187-3191 (2009).
93 I. Bergmair, M. Muehlberger, W. Schwinger, K. Hingerl, E. B. Kley, H. Schmidt, R. Schoeftner, "Reversal mu CP using hard stamps," Microelectron. Eng. 86 (4-6), 650-653 (2009).
92 T. Gischkat, H. Hartung, F. Schrempel, E. B. Kley, A. Tünnermann, W. Wesch, "Patterning of LiNbO(3) by means of ion irradiation using the electronic energy deposition and wet etching," Microelectron. Eng. 86 (4-6), 910-912 (2009).
91 C. Brückner, T. Käsebier, B. Pradarutti, S. Riehemann, G. Notni, E.-B. Kley, A. Tünnermann, "Broadband antireflective structures applied to high resistive float zone silicon in the THz spectral range," Opt. Express 17 (5), 3063-3077 (2009).
90 F. Brückner, D. Friedrich, M. Britzger, T. Clausnitzer, O. Burmeister, E.-B. Kley, K. Danzmann, A. Tünnermann, R. Schnabel, "Encapsulated subwavelength grating as a quasi-monolithic resonant reflector," Opt. Express 17 (26), 24334-24341 (2009).
89 F. Brückner, D. Friedrich, T. Clausnitzer, O. Burmeister, M. Britzger, E.-B. Kley, K. Danzmann, A. Tünnermann, R. Schnabel, "Demonstration of a cavity coupler based on a resonant waveguide grating," Opt. Express 17 (1), 163-169 (2009).
88 C. Helgert, C. Menzel, C. Rockstuhl, E. Pshenay-Severin, E. B. Kley, A. Chipouline, A. Tünnermann, F. Lederer, T. Pertsch, "Polarization-independent negative-index metamaterial in the near infrared," Opt. Lett. 34 (5), 704-706 (2009).
87 F. Schrempel, T. Gischkat, H. Hartung, T. Hoeche, E.-B. Kley, A. Tünnermann, W. Wesch, "Ultrathin membranes in x-cut lithium niobate," Opt. Lett. 34 (9), 1426-1428 (2009).
86 M. P. Edgar, B. W. Barr, J. Nelson, M. V. Plissi, K. A. Strain, O. Burmeister, M. Britzger, K. Danzmann, R. Schnabel, T. Clausnitzer, F. Brückner, E. B. Kley, A. Tünnermann, "Experimental demonstration of a suspended diffractively coupled optical cavity," Opt. Lett. 34 (20), 3184-3186 (2009).
85 C. Schmidt, A. Chipouline, T. Käsebier, E. B. Kley, A. Tünnermann, T. Pertsch, V. Shuvayev, L. I. Deych, "Observation of optical coupling in microdisk resonators," Phys. Rev. A 80 (4), 043841 (2009).
84 C. Helgert, C. Rockstuhl, C. Etrich, C. Menzel, E.-B. Kley, A. Tünnermann, F. Lederer, T. Pertsch, "Effective properties of amorphous metamaterials," Phys. Rev. B 79 (23), 233107 (2009).
83 D. J. Vine, D. M. Paganin, K. M. Pavlov, K. Uesugi, A. Takeuchi, Y. Suzuki, N. Yagi, T. Kämpfe, E.-B. Kley, E. Foerster, "Deterministic Retrieval of Complex Green's Functions Using Hard X Rays," Phys. Rev. Lett. 102 (4), (2009).
82 P. Hoyer, M. Theuer, R. Beigang, E. B. Kley, "Terahertz emission from black silicon," Appl. Phys. B-Lasers Opt. 93 (9), (2008).
81 R. Heming, L.-C. Wittig, P. Dannberg, J. Jahns, E.-B. Kley, M. Gruber, "Efficient Planar-Integrated Free-Space Optical Interconnects Fabricated by a Combination of Binary and Analog Lithography," J. Lightwave Technol. 26 (13-16), 2136-2141 (2008).
80 T. Kämpfe, E.-B. Kley, A. Tünnermann, "Designing multiplane computer-generated holograms with consideration of the pixel shape and the illumination wave," J. Opt. Soc. Am. A-Opt. Image Sci. Vis. 25 (7), 1609-1622 (2008).
79 A. K. Bansal, W. Holzer, A. Penzkofer, E. B. Kley, "Spectroscopic and lasing characterisation of a dicarbazovinylene-MEH-benzene dye," Opt. Commun. 281 (14), 3806-3819 (2008).
78 T. Clausnitzer, T. Kämpfe, E. B. Kley, A. Tünnermann, A. V. Tishchenko, O. Parriaux, "Highly-dispersive dielectric transmission gratings with 100% diffraction efficiency," Opt. Express 16 (8), 5577-5584 (2008).
77 D. Friedrich, O. Burmeister, A. Bunkowski, T. Clausnitzer, S. Fahr, E.-B. Kley, A. Tünnermann, K. Danzmann, R. Schnabel, "Diffractive beam splitter characterization via a power-recycled interferometer," Opt. Lett. 33 (2), 101-103 (2008).
76 F. Brückner, T. Clausnitzer, O. Burmeister, D. Friedrich, E.-B. Kley, K. Danzmann, A. Tünnermann, R. Schnabel, "Monolithic dielectric surfaces as new low-loss light-matter interfaces," Opt. Lett. 33 (3), 264-266 (2008).
75 H. Hartung, E.-B. Kley, A. Tünnermann, T. Gischkat, F. Schrempel, W. Wesch, "Fabrication of ridge waveguides in zinc-substituted lithium niobate by means of ion-beam enhanced etching," Opt. Lett. 33 (20), 2320-2322 (2008).
74 T. Clausnitzer, T. Kämpfe, F. Brückner, R. Heinze, E.-B. Kley, A. Tünnermann, "Reflection-reduced encapsulated transmission grating," Opt. Lett. 33 (17), 1972-1974 (2008).
73 U. D. Zeitner, M. Banasch, E.-B. Kley, "The making of a computer-generated hologram," Photon. Spect. 42 (12), 58-61 (2008).
72 A. K. Bansal, W. Holzer, A. Penzkofer, H.-H. Hoerhold, E. Klemm, W. Frank, E. B. Kley, "Spectroscopic and lasing characterisation of a luminescent phenylene/bipyridine polymer," Synth. Met. 158 (19-20), 758-766 (2008).
71 S. Fahr, T. Clausnitzer, E.-B. Kley, A. Tünnermann, "Reflective diffractive beam splitter for laser interferometers," Appl. Optics 46 (24), 6092-6095 (2007).
70 T. Clausnitzer, T. Kämpfe, E.-B. Kley, A. Tünnermann, A. Tishchenko, O. Parriaux, "Investigation of the polarization-dependent diffraction of deep dielectric rectangular transmission gratings illuminated in Littrow mounting," Appl. Optics 46 (6), 819-826 (2007).
69 T. Kämpfe, E.-B. Kley, A. Tünnermann, P. Dannberg, "Design and fabrication of stacked, computer generated holograms for multicolor image generation," Appl. Optics 46 (22), 5482-5488 (2007).
68 J. Thomas, E. Wikszak, T. Clausnitzer, U. Fuchs, U. Zeitner, S. Nolte, A. Tünnermann, "Inscription of fiber Bragg gratings with femtosecond pulses using a phase mask scanning technique," Appl. Phys. A-Mater. Sci. Process. 86 (2), 153-157 (2007).
67 T. Glinsner, P. Lindner, M. Muehlberger, I. Bergmair, R. Schoeftner, K. Hingerl, H. Schmid, E.-B. Kley, "Fabrication of 3D-photonic crystals via UV-nanoimprint lithography," J. Opt. Soc. Am. B-Opt. Phys. 25 (6), 2337-2340 (2007).
66 M. Muehlberger, I. Bergmair, W. Schwinger, M. Gmainer, R. Schoeftner, T. Glinsner, C. Hasenfuss, K. Hingerl, M. Vogler, H. Schmidt, E. B. Kley, "A Moire method for high accuracy alignment in nanoimprint lithography," Microelectron. Eng. 84 (5-8), 925-927 (2007).
65 M. Vogler, S. Wiedenberg, M. Muehlberger, I. Bergmair, T. Glinsner, H. Schmidt, E.-B. Kley, G. Gruetzner, "Development of a novel, low-viscosity UV-curable polymer system for UV-nanoimprint lithography," Microelectron. Eng. 84 (5-8), 984-988 (2007).
64 J. A. Fueloep, Z. Major, A. Henig, S. Kruber, R. Weingartner, T. Clausnitzer, E.-B. Kley, A. Tünnermann, V. Pervak, A. Apolonski, J. Osterhoff, R. Hoerlein, F. Krausz, S. Karsch, "Short-pulse optical parametric chirped-pulse amplification for the generation of high-power few-cycle pulses," New J. Phys. 9, (2007).
63 R. Nawrodt, A. Zimmer, T. Koettig, T. Clausnitzer, A. Bunkowski, E. B. Kley, R. Schnabel, K. Danzmann, S. Nietzsche, W. Vodel, A. Tünnermann, P. Seidel, "Mechanical Q-factor measurements on a test mass with a structured surface," New J. Phys. 9, (2007).
62 D. Radtke, J. Duparre, U. D. Zeitner, A. Tünnermann, "Laser lithographic fabrication and characterization of a spherical artificial compound eye," Opt. Express 15 (6), 3067-3077 (2007).
61 R. Iliew, C. Etrich, M. Augustin, E. B. Kley, S. Nolte, A. Tünnermann, F. Lederer, "Linear and nonlinear effects of light propagation in low-index photonic crystal slabs," Phys. Status Solidi A-Appl. Mat. 204 (11), 3689-3707 (2007).
60 M. Augustin, R. Iliew, C. Etrich, F. Setzpfandt, H.-J. Fuchs, E.-B. Kley, S. Nolte, T. Pertsch, F. Lederer, A. Tünnermann, "Dispersion properties of photonic crystal waveguides with a low in-plane index contrast," New J. Phys. 8, 210 (2006).
59 F. Schrempel, T. Gischkat, H. Hartung, E. B. Kley, W. Wesch, "Ion beam enhanced etching of LiNbO3," Nucl. Instrum. Methods Phys. Res. Sect. B-Beam Interact. Mater. Atoms 250, 164-168 (2006).
58 A. Bunkowski, O. Burmeister, K. Danzmann, R. Schnabel, T. Clausnitzer, E. B. Kley, A. Tünnermann, "Demonstration of three-port grating phase relations," Opt. Lett. 31 (16), 2384-2386 (2006).
57 U. Fuchs, U. Zeitner, A. Tünnermann, "Hybrid optics for focusing ultrashort laser pulses," Opt. Lett. 31 (10), 1516-1518 (2006).
56 M. Augustin, R. Iliew, C. Etrich, D. Schelle, H. Fuchs, U. Peschel, S. Nolte, E. Kley, F. Lederer, A. Tünnermann, "Self-guiding of infrared and visible light in photonic crystal slabs," Appl. Phys. A-Mater. Sci. Process. 81 (2-3), 313-319 (2005).
55 T. Clausnitzer, A. Tishchenko, E. Kley, H. Fuchs, D. Schelle, "Narrowband, polarization-independent free-space wave notch filter," J. Opt. Soc. Am. A-Opt. Image Sci. Vis. 22 (12), 2799-2803 (2005).
54 T. Clausnitzer, E. Kley, A. Tünnermann, A. Bunkowski, O. Burmeister, K. Danzmann, R. Schnabel, S. Gliech, A. Duparre, "Ultra low-loss low-efficiency diffraction gratings," Opt. Express 13 (12), 4370-4378 (2005).
53 T. Clausnitzer, T. Kampfe, E. Kley, A. Tünnermann, U. Peschel, A. Tishchenko, O. Parriaux, "An intelligible explanation of highly-efficient diffraction in deep dielectric rectangular transmission gratings," Opt. Express 13 (26), 10448-10456 (2005).
52 U. Fuchs, U. Zeitner, A. Tünnermann, "Ultra-short pulse propagation in complex optical systems," Opt. Express 13 (10), 3852-3861 (2005).
51 S. Wise, V. Quetschke, A. Deshpande, G. Müller, D. Reitze, D. Tanner, B. Whiting, Y. Chen, A. Tünnermann, E. Kley, T. Clausnitzer, "Phase effects in the diffraction of light: Beyond the grating equation," Phys. Rev. Lett. 95 (1), 013901 (2005).
50 T. Kaempfe, E.-B. Kley, A. Tünnermann, "Design and fabrication of refractive and diffractive micro optical elements used in holographic recording setups," 5965 (596503) (2005).
49 M. Augustin, H. Fuchs, D. Schelle, E. Kley, S. Nolte, A. Tünnermann, R. Iliew, C. Etrich, U. Peschel, F. Lederer, "High transmission and single-mode operation in low-index-contrast photonic crystal waveguide devices," Appl. Phys. B-Lasers Opt. 84 (5), 663-665 (2004).
48 R. Iliew, C. Etrich, U. Peschel, F. Lederer, M. Augustin, H. Fuchs, D. Schelle, E. Kley, S. Nolte, A. Tünnermann, "Diffractionless propagation of light in a low-index photonic-crystal film," Appl. Phys. B-Lasers Opt. 85 (24), 5854-5856 (2004).
47 M. Augustin, R. Iliew, H. Fuchs, U. Peschel, E. Kley, S. Nolte, F. Lederer, A. Tünnermann, "Investigation of photonic crystals with a low in-plane index contrast," Jpn. J. Appl. Phys. 43 (8B), 5805-5808 (2004).
46 B. Schnabel, K. Gunther, H. Eichhorn, J. Gramss, D. Beyer, E. Kley, W. Rockstroh, "Fast data preparation for high-quality and large-area computer generated hologram fabrication," Microelectron. Eng. 73-4 (SI), 80-84 (2004).
45 H. Elfstrom, T. Vallius, M. Kuittinen, J. Turunen, T. Clausnitzer, E. Kley, "Diffractive elements with novel antireflection film stacks," Opt. Express 12 (25), 6385-6390 (2004).
44 A. Bunkowski, O. Burmeister, P. Beyersdorf, K. Danzmann, R. Schnabel, T. Clausnitzer, E. Kley, A. Tünnermann, "Low-loss grating for coupling to a high-finesse cavity," Opt. Lett. 29 (20), 2342-2344 (2004).
43 W. Holzer, A. Penzkofer, A. Lux, H. Horhold, E. Kley, "Photo-physical and lasing characterisation of neat films of a thianthrene-substituted distyrylbenzene dye (Thianthrene-DSB)," Synth. Met. 145 (2-3), 119-127 (2004).
42 T. Clausnitzer, J. Limpert, K. Zollner, H. Zellmer, H. Fuchs, E. Kley, A. Tünnermann, M. Jupe, D. Ristau, "Highly efficient transmission gratings in fused silica for chirped-pulse amplification systems," Appl. Optics 42 (34), 6934-6938 (2003).
41 J. Ruske, B. Zeitner, A. Tünnermann, A. Rasch, "Photorefractive effect and high power transmission in LiNbO3 channel waveguides," C. R. Phys. 39 (14), 1048-1050 (2003).
40 J. Ruske, E. Werner, B. Zeitner, A. Tünnermann, "Integrated optical ultrashort-pulse picker with high extinction ratio," C. R. Phys. 39 (20), 1442-1443 (2003).
39 R. Herda, A. Liem, B. Schnabel, A. Drauschke, H. Fuchs, E. Kley, H. Zellmer, A. Tünnermann, "Efficient side-pumping of fibre lasers using binary gold diffraction gratings," C. R. Phys. 39 (3), 276-277 (2003).
38 L. Wittig, E. Kley, A. Tünnermann, "Micro- and nanostructured optics," Electron. Lett. 76 (C2), 41-46 (2003).
37 V. Yankov, S. Babin, I. Ivonin, A. Goltsov, A. Morozov, L. Polonskiy, M. Spector, A. Talapov, E. Kley, H. Schmidt, "Multiwavelength Bragg gratings and their application to optical MUX/DEMUX devices," IEEE Photonics Technol. Lett. 15 (3), 410-412 (2003).
36 E. Werner, J. Ruske, B. Zeitner, W. Biehlig, A. Tünnermann, "Integrated-optical amplitude modulator for high power applications," Opt. Commun. 221 (1-3), 9-12 (2003).
35 M. Augustin, H. Fuchs, D. Schelle, E. Kley, S. Nolte, A. Tünnermann, R. Iliew, C. Etrich, U. Peschel, F. Lederer, "Highly efficient waveguide bends in photonic crystal with a low in-plane index contrast," Opt. Express 11 (24), 3284-3289 (2003).
34 J. Limpert, T. Clausnitzer, A. Liem, T. Schreiber, H. Fuchs, H. Zellmer, E. Kley, A. Tünnermann, "High-average-power femtosecond fiber chirped-pulse amplification system," Opt. Lett. 28 (20), 1984-1986 (2003).
33 C. Bauer, B. Schnabel, E. Kley, U. Scherf, H. Giessen, R. Mahrt, "Two-photon pumped lasing from a two-dimensional photonic bandgap structure with polymeric gain material," Adv. Eng. Mater. 14 (9), 673-676 (2002).
32 T. Glaser, S. Schröter, H. Bartelt, H. Fuchs, E. Kley, "Diffractive optical isolator made of high-efficiency dielectric gratings only," Appl. Optics 41 (18), 3558-3566 (2002).
31 U. Grusemann, B. Zeitner, M. Rottschalk, J. Ruske, A. Tünnermann, A. Rasch, "Integrated-optical wavelength sensor with self-compensation of thermally induced phase shifts by use of a LiNbO3 unbalanced Mach-Zehnder interferometer," Appl. Optics 41 (29), 6211-6219 (2002).
30 W. Holzer, A. Penzkofer, T. Pertsch, N. Danz, A. Bräuer, E. Kley, H. Tillmann, C. Bader, H. Horhold, "Corrugated neat thin-film conjugated polymer distributed-feedback lasers," Appl. Phys. A-Mater. Sci. Process. 74 (4-5), 333-342 (2002).
29 N. Moll, R. Mahrt, C. Bauer, H. Giessen, B. Schnabel, E. Kley, U. Scherf, "Erratum: Evidence for bandedge lasing in a two-dimensional photonic bandgap polymer laser ," Appl. Phys. B-Lasers Opt. 80 (14), 2610 (2002).
28 N. Moll, R. Mahrt, C. Bauer, H. Giessen, B. Schnabel, E. Kley, U. Scherf, "Evidence for bandedge lasing in a two-dimensional photonic bandgap polymer laser," Appl. Phys. B-Lasers Opt. 80 (5), 734-736 (2002).
27 J. Limpert, T. Schreiber, T. Clausnitzer, K. Zollner, H. Fuchs, E. Kley, H. Zellmer, A. Tünnermann, "High-power femtosecond Yb-doped fiber amplifier," Opt. Express 10 (14), 628-638 (2002).
26 C. Bauer, H. Giessen, B. Schnabel, E. Kley, C. Schmitt, U. Scherf, R. Mahrt, "A surface-emitting circular grating polymer laser," Adv. Eng. Mater. 13 (15), 1161 (2001).
25 S. Buhling, F. Wyrowski, E. Kley, A. Nellissen, L. Wang, M. Dirkzwager, "Resolution enhanced proximity printing by phase and amplitude modulating masks," J. Microelectromech. Syst. 11 (5), 603-611 (2001).
24 B. Schnabel, E. Kley, "On the influence of the e-beam writer address grid on the optical quality of high-frequency gratings," Microelectron. Eng. 57-8, 327-333 (2001).
23 L. Wittig, A. Cumme, T. Harzendorf, E. Kley, "Intermittence effect in electron beam writing," Microelectron. Eng. 57-8, 321-326 (2001).
22 M. Barge, S. Bruynooghe, F. Clube, A. Nobari, J. Saussol, E. Grass, H. Mayer, B. Schnabel, E. Kley, "120-nm lithography using off-axis TIR holography and 364 nm exposure wavelength," Microelectron. Eng. 57-8, 59-63 (2001).
21 L.-C. Wittig, M. Cumme, S. Nolte, E.-B. Kley, A. Tünnermann, "Beam shaping for multimode beams," 4440(34) (2001).
20 C. Gimkiewicz, D. Hagedorn, J. Jahns, E. Kley, F. Thoma, "Fabrication of microprisms for planar optical interconnections by use of analog gray-scale lithography with high-energy-beam-sensitive glass," Appl. Optics 38 (14), 2986-2990 (1999).
19 U. Zeitner, B. Schnabel, E. Kley, F. Wyrowski, "Polarization multiplexing of diffractive elements with metal-stripe grating pixels," Appl. Optics 38 (11), 2177-2181 (1999).
18 U. Zeitner, H. Aagedal, F. Wyrowski, "Comparison of resonator-originated and external beam shaping," Appl. Optics 38 (6), 980-986 (1999).
17 U. Zeitner, F. Wyrowski, "High modal discrimination for laser resonators with Gaussian output beam," J. Mod. Opt. 46 (9), 1309-1314 (1999).
16 P. Dannberg, L. Erdmann, R. Bierbaum, A. Krehl, A. Bräuer, E. Kley, "Micro-optical elements and their integration to glass and optoelectronic wafers," Microsyst. Technol. 6 (2), 41-47 (1999).
15 B. Schnabel, E. Kley, F. Wyrowski, "Study on polarizing visible light by subwavelength-period metal-stripe gratings," Opt. Eng. 38 (2), 220-226 (1999).
14 E.-B. Kley, L.-C. Wittig, M. Cumme, U.D. Zeitner, P. Dannberg, "Fabrication and properties of refractive micro-optical beam-shaping elements," 3879 (20) (1999).
13 L.-C. Wittig, E.-B. Kley, "Approximation of refractive micro-optical profiles by minimal surfaces," 3879 (32) (1999).
12 V. Pavelyev, V. Soifer, M. Duparre, R. Kowarschik, B. Ludge, B. Kley, "Iterative calculation, manufacture and investigation of DOE forming unimodal complex distribution," Opt. Lasers Eng. 29 (4-5), 269-279 (1998).
11 R. Waldhäusl, B. Schnabel, P. Dannberg, E. Kley, A. Bräuer, W. Karthe, "Efficient coupling into polymer waveguides by gratings," Appl. Optics 36 (36), 9383-9390 (1997).
10 R. Waldhäusl, B. Schnabel, E. Kley, A. Bräuer, "Efficient focusing polymer waveguide grating couplers," Electron. Lett. 33 (7), 623-624 (1997).
9 K. Blüthner, M. Götz, A. Hadicke, W. Krech, T. Wagner, H. Mühlig, H. Fuchs, U. Hubner, D. Schelle, E. Kley, L. Fritzsch, "Single-electron transistors based on Al/AlOx/Al and Nb/AlOx/Nb tunnel junctions," IEEE Trans. Appl. Supercond. 7 (2, Part 3), 3099-3102 (1997).
8 E. Kley, "Continuous profile writing by electron and optical lithography," Microelectron. Eng. 34 (3-4), 261-298 (1997).
7 M. Golub, M. Duparre, E. Kley, R. Kowarschik, B. Ludge, W. Rockstroh, H. Fuchs, "New diffractive beam shaper generated with the aid of e-beam lithography," Opt. Eng. 35 (5), 1400-1406 (1996).
6 M. Götz, K. Blüthner, W. Krech, A. Nowack, H. Fuchs, E. Kley, P. Thieme, T. Wagner, G. Eska, K. Hecker, H. Hegger, "Self-aligned in-line tunnel junctions for single-charge electronics," Physica B 218 (1-4), 272-275 (1996).
5 M. Götz, K. Blüthner, W. Krech, A. Nowack, H. Fuchs, E. Kley, P. Thieme, T. Wagner, G. Eska, K. Hecker, H. Hegger, "Preparation of self?aligned in?line tunnel junctions for applications in single?charge electronics ," J. Appl. Phys. 78 (9), 5499-5502 (1995).
4 W. Brunger, E. Kley, C. Schnabel, I. Stolberg, M. Zierbock, R. Plontke, "Low energy lithography; energy control and variable energy exposure," Microelectron. Eng. 27 (1-4), 135-138 (1995).
3 H. Meyer, H. Kohler, A. Chwala, K. Blüthner, P. Weber, E. Kley, W. Rockstroh, "Microwave circuit for the generation of Josephson voltages at low frequencies," Supercond. Sci. Technol. 7 (5), 327-329 (1994).
2 M. Manzel, H. Bruchlos, E. Steinbeiss, T. Eick, M. Klinger, J. Fuchs, B. Kley, "TiBaCaCuO-films for passive microwave devices," Physica C 201 (3-4), 337-339 (1992).
1 W. Zahn, P. Weber, K. Blüthner, E. Kley, "Submicron High Critical Current Density Niobium-Lead Josephson Junctions," Phys. Status Solidi A-Appl. Mat. 69 (1), K25-K28 (1982).