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248 B.N. Tugchin, N. Janunts, M. Steinert, K. Dietrich, E.B. Kley, A. Tünnermann, T. Pertsch, "Quasi-linearly polarized hybrid modes in tapered and metal-coated tips with circular apertures: understanding the functionality of aperture tips," New J. Phys. 19, 063024 (2017).
247 C. Liu, C. Straif, T. Flügel-Paul, U.D. Zeitner, H. Gross, "Comparison of hyperspectral imaging spectrometer designs and the improvement of system performance with freeform surfaces," Appl. Optics 56 (24), 6894-6901 (2017).
246 M. Heusinger, M. Banasch, U.D. Zeitner, "Rowland ghost suppression in high efficiency spectrometer gratings fabricated by e-beam lithography," Opt. Express 25 (6), 6182-6190 (2017).
245 R. Mac Ciarnain, D. Michaelis, T. Wehlus, A.F. Rausch, N. Danz, A. Brauer, A. Tünnermann, "Emission from outside of the emission layer in state-of-the-art phosphorescent organic light-emitting diodes," Org. Electron. 44, 115-119 (2017).
244 R. Mac Ciarnain, D. Michaelis, T. Wehlus, A.F. Rausch, S. Wehrmeister, T.D. Schmidt, W. Brutting, N. Danz, A. Brauer, A. Tünnermann, "Plasmonic Purcell effect reveals obliquely ordered phosphorescent emitters in Organic LEDs," Scientific Reports 7, 1826 (2017).
243 S. Shestaeva, A. Bingel, P. Munzert, L. Ghazaryan, C. Patzig, A. Tünnermann, A. Szeghalmi, "Mechanical, structural, and optical properties of PEALD metallic oxides for optical applications," Appl. Optics 56 (4), C47-C59 (2017).
242 A. Bingel, M. Steglich, P. Naujok, R. Müller, U. Schulz, N. Kaiser, A. Tünnermann, "Influence of the ZnO:Al dispersion on the performance of ZnO:Al/Ag/ZnO:Al transparent electrodes," Thin Solid Films 616, 594-600 (2016).
241 A. Bingel, O. Stenzel, P. Naujok, R. Müller, S. Shestaeva, M. Steglich, U. Schulz, N. Kaiser, A. Tünnermann , "AZO/Ag/AZO transparent conductive films: correlation between the structural, electrical, and optical properties and development of an optical model ," Opt. Mater. Express 6(10), 3217-3232 (2016).
240 B. N. Tugchin, N. Janunts, M. Steinert, K. Dietrich, D. Sivun, S. Ramachandran, K. V. Nerkararyan, A. Tünnermann, T. Pertsch, "Controlling the excitation of radially polarized conical plasmons in plasmonic tips in liquids," RSC Adv. 6, 53273-53281 (2016).
239 C. Reinlein, C. Damm, N. Lange, A. Kamm, M. Mohaupt, A. Brady, M. Goy, N. Leonhard, R. Eberhardt, U. Zeitner, A. Tünnermann, "Temporally-stable active precision mount for large optics," Opt. Express 24 (12), 13527-13541 (2016).
238 K. Pfeiffer, S. Shestaeva, A. Bingel, P. Munzert, L. Ghazaryan, C. van Helvoirt, W. M. M. Kessels, U. T. Sanli, C. Grevent, G. Schütz, M. Putkonen, I. Buchanan, L. Jensen, D. Ristau, A. Tünnermann, A. Szeghalmi, "Comparative study of ALD SiO2 thin films for optical applications," Opt. Mater. Express 6 (2), 660-670 (2016).
237 K. Puthankovilakam, T. Scharf, M. S. Kim, A. Naqavi, H. P. Herzig, T. Weichelt, U. Zeitner, U. Vogler, R. Völkel, "Intensity and phase fields behind phase-shifting masks studied with high-resolution interference microscopy," J. Micro-Nanolithogr. MEMS MOEMS 15 (2), 021203 (2016).
236 L. Ghazaryan, E. B. Kley, A. Tünnermann, A. Szeghalmi, "Nanoporous SiO2 thin films made by atomic layer deposition and atomic etching," NanoTechnology 27 (25), 255603 (2016).
235 M. Heusinger, T. Flugel-Paul, U.D. Zeitner, "Large-scale segmentation errors in optical gratings and their unique effect onto optical scattering spectra," Appl. Phys. B-Lasers Opt. 122 (8), 222 (2016).
234 M. Steglich, T. Käsebier, E.B. Kley, A. Tünnermann, "Black Germanium fabricated by reactive ion etching," Appl. Phys. A-Mater. Sci. Process. 122 (9), 836 (2016).
233 P. Genevée, E. Ahiavi, N. Janunts, T. Pertsch, M. Oliva, E. B. Kley, A. Szeghalmi, "Blistering during the atomic layer deposition of iridium," J. Vac. Sci. Technol. A 34 (1), 01A113 (2016).
232 R. Geiss, A. Sergeyev, H. Hartung, A. S. Solntsev, A. A. Sukhorukov, R. Grange, F. Schrempel, E.-B. Kley, A. Tünnermann, T. Pertsch, "Fabrication of free-standing lithium niobate nanowaveguides down to 50nm in width," NanoTechnology 27 (6), 065301 (2016).
231 S. Bruynooghe, M. Schulze, M. Helgert, M. Challier, D. Tonova, M. Sundermann, T. Koch, A. Gatto, E.B. Kley, "Broadband and wide-angle hybrid antireflection coatings prepared by combining interference multilayers with subwavelength structures," J. Nanophotonics 10 (3), 033002 (2016).
230 T. Siefke, S. Kroker, K. Pfeiffer, O. Puffky, K. Dietrich, D.Franta, I. Ohlídal, A. Szeghalmi, E.-B. Kley, A. Tünnermann, "Materials Pushing the Application Limits of Wire Grid Polarizers further into the Deep Ultraviolet Spectral Range," Adv. Opt. Mater. 4 (11), 1780-1786 (2016).
229 T.Weichelt, R. Kinder, U.D. Zeitner, "Photomask displacement technology for continuous profile generation by Mask Aligner Lithography," J. Opt. 18 (12), 125401 (2016).
228 Y.F. Li, H.Y. Chen, S. Kroker, T. Käsebier, Z.K. Liu, K.Q. Qiu, Y. Liu, E.B. Kley, X.D. Xu, Y.L. Hong, S.J. Fu, "Near-field holography enhanced with antireflection coatings-an improved method for fabricating diffraction gratings," Chin. Opt. Lett. 14 (9), 090501 (2016).
227 A. Sergeyev, R. Geiss, A. S. Solntsev, A. A. Sukhorukov, F. Schrempel, T. Pertsch, R. Grange, "Enhancing Guided Second-Harmonic Light in Lithium Niobate Nanowires," ACS Photonics 2 (6), 687-691 (2015).
226 B. N. Tugchin, N. Janunts, A. E. Klein, M. Steinert, S. Fasold, S. Diziain, M. Sison, E.-B. Kley, A. Tünnermann, T. Pertsch, "Plasmonic Tip Based on Excitation of Radially Polarized Conical Surface Plasmon Polariton for Detecting Longitudinal and Transversal Fields," ACS Photonics 2 (10), 1468-1475 (2015).
225 D. Lehr, J. Reinhold, I. Thiele, H. Hartung, K. Dietrich, C. Menzel, T. Pertsch, E.-B. Kley, A. Tünnermann, "Enhancing Second Harmonic Generation in Gold Nanoring Resonators Filled with Lithium Niobate," Nano Lett. 15 (2), 1025?1030 (2015).
224 L. Stürzebecher, F. Fuchs, U.D. Zeitner, A. Tünnermann, "High resolution proximity lithography for nano-optical components," Microelectron. Eng. 132, 120-134 (2015).
223 M. Beier, J. Hartung, T. Peschel, C. Damm, A. Gebhardt, S. Scheiding, D. Stumpf, U. D. Zeitner, S. Risse, R. Eberhardt, A. Tünnermann, "Development, fabrication, and testing of an anamorphic imaging snap-together freeform telescope," Appl. Optics 54 (12), 3530-3542 (2015).
222 M. Meinders, S. Kroker, A. P. Singh, E.-B. Kley, A. Tünnermann, K. Danzmann, R. Schnabel, "Cancellation of lateral displacement noise of three-port gratings for coupling light to cavities.," Opt. Lett. 40 (9), 2053-2055 (2015).
221 M. Otto, M. Algasinger, H. Branz, B. Gesemann, T. Gimpel, K. Füchsel, T. Käsebier, S. Kontermann, S. Koynov, X. Li, V. Naumann, J. Oh, A. N. Sprafke, J. Ziegler, M. Zilk, R. B. Wehrspohn , "Black Silicon Photovoltaics," Adv. Opt. Mater. 3 (2), 147-164 (2015).
220 M. Steglich, M. Oehme, T. Käsebier, M. Zilk, K. Kostecki, E.-B. Kley, J. Schulze, A. Tünnermann, "Ge-on-Si photodiode with black silicon boosted responsivity," Appl. Phys. Lett. 107 (5), 051103 (2015).
219 M. Steglich, T. Käsebier, F. Schrempel, E.-B. Kley, A. Tünnermann, "Self-organized, effective medium Black Silicon for infrared antireflection," Infrared Phys. Technol. 69, 218-221 (2015).
218 R. Alaee, D. Lehr, R. Filter, F. Lederer, E.-B. Kley, C. Rockstuhl, A. Tünnermann, "Scattering Dark States in Multiresonant Concentric Plasmonic Nanorings," ACS Photonics 2 (8), 1085-1090 (2015).
217 R. Alaee, R. Filter, D. Lehr, F. Lederer, C. Rockstuhl , "A generalized Kerker condition for highly directive nanoantennas ," Opt. Lett. 40 (11), 2645-2648 (2015).
216 R. Geiss, A. Sergeyev, H. Hartung, A. Solntsev, A. Sukhorukov, R. Grange, F. Schrempel, E.-B. Kley, A. Tuennermann, T. Pertsch, "Fabrication of free-standing lithium niobate nanowaveguides down to 50 nm in width," NanoTechnology 27, 065301 (2015).
215 R. Geiss, J. Brandt, H. Hartung, A. Tünnermann, T. Pertsch, E.-B. Kley, F. Schrempel, "Photonic microstructures in lithium niobate by potassium hydroxide-assisted ion beam-enhanced etching," J. Vac. Sci. Technol. B 33 (1), 010601 (2015).
214 R. Geiss, S. Saravi, A. Sergeyev, S. Diziain, F. Setzpfandt, F. Schrempel, R. Grange, E.-B. Kley, A. Tünnermann, T. Pertsch, "Fabrication of nanoscale lithium niobate waveguides for second-harmonic generation," Opt. Lett. 40 (12), 2715-2718 (2015).
213 S. Kroker, R. Nawrodt, "The Einstein Telescope," IEEE Instrum. Meas. Mag. 18(3), 4-8 (2015).
212 S. Leavey, B. W. Barr, A. S. Bell, N. Gordon, C. Graef, S. Hild, S. H. Huttner, E.-B. Kley, S. Kroker, J. Macarthur, C. Messenger, M. Pitkin, B. Sorazu, K. Strain, A. Tünnermann, "Upper limit to the transverse to longitudinal motion coupling of a waveguide mirror," Class. Quantum Gravity 32 (17), 175005 (2015).
211 S. Ratzsch, E.-B. Kley, A. Tünnermann, A. Szeghalmi, "Inhibition of Crystal Growth during Plasma Enhanced Atomic Layer Deposition by Applying BIAS," Materials 8 (11), 7805-7812 (2015).
210 S. Ratzsch, E.-B. Kley, A. Tünnermann, A. Szeghalmi, "Influence of the oxygen plasma parameters on the atomic layer deposition of titanium dioxide," NanoTechnology 26 (2), 024003 (2015).
209 S. Ratzsch, E.-B. Kley, A. Tünnermann, A. Szeghalmi, "Encapsulation process for diffraction gratings.," Opt. Express 23 (14), 17955-65 (2015).
208 T. Paul, A. Matthes, T. Harzendorf, S. Ratzsch, U.D. Zeitner , "Half-wave phase retarder working in transmission around 630nm realized by atomic layer deposition of sub-wavelength gratings," Opt. Mater. Express 5, 124-129 (2015).
207 T. Weichelt, L. Stürzebecher, U. D. Zeitner, "Optimized lithography process for through-silicon vias-fabrication using a double-sided (structured) photomask for mask aligner lithography," J. Micro-Nanolithogr. MEMS MOEMS 14 (3), 034501 (2015).
206 Y. Bourgin, T. Siefke, T. Käsebier, P. Genevee, A. Szeghalmi, E.-B. Kley, U. D. Zeitner, "Double-sided structured mask for sub-micron resolution proximity i-line mask-aligner lithography," Opt. Express 23 (13), 16628-37 (2015).
205 A. Cumming, L. Cunningham, G.D. Hammond, K. Haughian, J. Hough, S. Kroker, I. W. Martin, R. Nawrodt, S. Rowan, C. Schwarz, A. A. van Veggel, "Silicon mirror suspensions for gravitational wave detectors ," Class. Quantum Gravity 31, 025017 (2014).
204 D. Lehr, R. Alaee, R. Filter, K. Dietrich, T. Siefke, C. Rockstuhl, F. Lederer, E.-B. Kley, A. Tünnermann, "Plasmonic nanoring fabrication tuned to pitch: Efficient, deterministic, and large scale realization of ultra-small gaps for next generation plasmonic devices," Appl. Phys. Lett. 105 (14), 143110 (2014).
203 D. Stumpf, U. D. Zeitner, "Extending standard mask lithography exposure technique to spherical surfaces," Appl. Phys. B-Lasers Opt. 115 (3), 371-377 (2014).
202 D. Stumpf, U.D. Zeitner, "Extending standard mask lithography exposure technique to spherical surfaces," Appl. Phys. B-Lasers Opt. 115 (3), 371-377 (2014).
201 K. Dietrich, C. Menzel, D. Lehr, O. Puffky, U. Hübner, T. Pertsch, A. Tünnermann, E.-B. Kley, "Elevating optical activity: Efficient on-edge lithography of three-dimensional starfish metamaterial," Appl. Phys. Lett. 104, 193107 (2014).
200 K. Keskinbora, A.-L. Robisch, M. Mayer, U. T. Sanli, C. Grevent, C. Wolter, M. Weigand, A. Szeghalmi, M. Knez, T. Salditt, G. Schutz, "Multilayer Fresnel zone plates for high energy radiation resolve 21 nm features at 1.2 keV.," Opt. Express 22 (15), 18440-18453 (2014).
199 L. Stürzebecher, F. Fuchs, T. Harzendorf, U. D. Zeitner, "Pulse compression grating fabrication by diffractive proximity photolithography," Opt. Lett. 39 (4), 1042-1045 (2014).
198 L. Stürzebecher, F. Fuchs, T. Harzendorf, U.D. Zeitner, "Pulse compression grating fabrication by diffractive proximity photolithography," Opt. Lett. 39 (4), 1042 - 1045 (2014).
197 M. Steglich, D. Lehr, S. Ratzsch, T. Käsebier, F. Schrempel, E.-B. Kley, A. Tünnermann, "An ultra-black silicon absorber," Laser Photon. Rev. 8 (2), L13-L17 (2014).
196 M. Steglich, T. Käsebier, M. Zilk, T. Pertsch, E.-B. Kley, A. Tünnermann, "The structural and optical properties of black silicon by inductively coupled plasma reactive ion etching," J. Appl. Phys. 116 (17), 173503 (2014).
195 O. Stenzel, S. Wilbrandt, X. Chen, R. Schlegel, L. Coriand, A. Duparré, U. Zeitner, T. Benkenstein, C. Wächter, "Observation of the waveguide resonance in a periodically patterned high refractive index broadband antireflection coating," Appl. Optics 53 (14), 3147-3156 (2014).
194 O. Stenzel, S. Wilbrandt, X. Chen, R. Schlegel, L. Coriand, A. Duparre, U. Zeitner, T. Benkenstein, C. Waechter, "Observation of the waveguide resonance in a periodically patterned high refractive index broadband antireflection coating," Appl. Optics 53 (14), 3147-3156 (2014).
193 R. Geiss, S. Diziain, M. Steinert, F. Schrempel, E.-B. Kley, A. Tünnermann, T. Pertsch, "Photonic crystals in lithium niobate by combining focussed ion beam writing and ion-beam enhanced etching," Phys. Status Solidi A-Appl. Mat. 211 (10), 2421-2425 (2014).
192 S. P. Scheeler, D. Lehr, E.-B. Kley, C. Pacholski, "Top-up fabrication of gold nanorings.," Chem.-Asian J. 9 (8), 2072-2076 (2014).
191 T. Siefke, D. Lehr, T. Weber, D. Voigt, E.-B. Kley, A. Tünnermann, "Fabrication influences on deep-ultraviolet tungsten wire grid polarizers manufactured by double patterning," Opt. Lett. 39 (22), 6434-6437 (2014).
190 T. Weber, S. Kroker, T. Käsebier, E.-B. Kley, A. Tünnermann, "Silicon wire grid polarizer for ultraviolet applications," Appl. Optics 53 (34), 8140-8144 (2014).
189 T. Weichelt, U. Vogler, L. Stürzebecher, R. Völkel, U. D. Zeitner, "Resolution enhancement for advanced mask aligner lithography using phase-shifting photomasks," Opt. Express 22 (13), 16310-16321 (2014).
188 T. Weichelt, U. Vogler, L. Stürzebecher, R. Völkel, U.D. Zeitner, "Resolution enhancement for advanced mask aligner lithography using phase shifting photomasks," Opt. Express 22, 16310-16321 (2014).
187 U. Blumröder, M. Steglich, F.Schrempel, P. Hoyer, S. Nolte, "THz emission from argon implanted silicon surfaces," Phys. Status Solidi B-Basic Solid State Phys. 252(1), 105-111 (2014).
186 Y. Bourgin, T. Kasebier, U. D. Zeitner, "250nm period grating transferred by proximity i-line mask-aligner lithography.," Opt. Lett. 39 (6), 1665-8 (2014).
185 Y. Bourgin, T. Käsebier, U.D. Zeitner, "250nm period grating transferred by proximity i-line mask-aligner lithography," Opt. Lett. 39 (6), 1665 (2014).
184 A. Bingel, K. Füchsel, N. Kaiser, A. Tünnermann, "ZnO:Al films prepared by inline DC magnetron sputtering," Adv. Opt. Technol. 3 (1), 103?111 (2013).
183 A. Sergeyev, R. Geiss, A. S. Solntsev, A. Steinbrück, F. Schrempel, E. B. Kley, T. Pertsch, R. Grange, "Second-harmonic generation in lithium niobate nanowires for local fluorescence excitation," Opt. Express 21 (16), 19012-19021 (2013).
182 C. Eckstein, U. Zeitner, "Modeling electro-optical characteristics of broad area semiconductor lasers based on a quasi-stationary multimode analysis," Opt. Express 21 (20), 23231-23240 (2013).
181 C. Eckstein, U. Zeitner, A. Tünnermann, U. Strauss, W. Schmid, C. Lauer, "Mode shaping in semiconductor broad area lasers by monolithically integrated phase structures," Opt. Lett. 38 (21), 4480-4482 (2013).
180 C. Schmidt, A. Chipouline, T. Käsebier, E. B. Kley, A. Tünnermann, T. Pertsch, "Differential all-optical tuning of eigenmodes in coupled microdisks," Appl. Phys. Lett. 103 (4), 041115 (2013).
179 D. Heinert, S. Kroker, D. Friedrich, S. Hild, E. B. Kley, S. Leavey, I. W. Martin, R. Nawrodt, A. Tünnermann, S. P. Vyatchanin, K. Yamamoto, "Calculation of thermal noise in grating reflectors," Phys. Rev. D 88 (4), 042001 (2013).
178 D. Stumpf, U. Zeitner, "Extending standard mask lithography exposure technique to spherical surfaces," Appl. Phys. B-Lasers Opt. 115 (3), 371?377 (2013).
177 G. Kalkowski, T. Benkenstein, C. Rothhardt, F. Fuchs, U. D. Zeitner, "Direct bonding for the encapsulation of transverse optical gratings," Microelectron. Eng. 110, 302-306 (2013).
176 H. C. Eckstein, U. D. Zeitner, A. Tünnermann, W. Schmid, U. Strauss, C. Lauer, "Mode shaping in semiconductor broad area lasers by monolithically integrated phase structures," Opt. Lett. 38 (21), 4480-4482 (2013).
175 H. C. Eckstein, U. D. Zeitner, "Modeling electro-optical characteristics of broad area semiconductor lasers based on a quasi-stationary multimode analysis," Opt. Express 21 (20), 23231-23240 (2013).
174 L. Ghazaryan, E. B. Kley, A. Tünnermann, A. V. Szeghalmi, "Stability and annealing of alucones and alucone alloys," J. Vac. Sci. Technol. A 31 (1), 01A149 (2013).
173 M. Oliva, D. Michaelis, F. Fuchs, A. Tünnermann, U. D. Zeitner, "Highly efficient broadband blazed grating in resonance domain," Appl. Phys. Lett. 102 (20), 203114 (2013).
172 M. Steglich, C. Patzig, L. Berthold, F. Schrempel, K. Füchsel, T. Höche, E. B. Kley, A. Tünnermann, "Heteroepitaxial Ge-on-Si by DC magnetron sputtering," AIP Adv. 3 (7), (2013).
171 M. Steglich, M. Zilk, A. Bingel, C. Patzig, T. Käsebier, F. Schrempel, E.-B. Kley, A. Tünnermann, "A normal-incidence PtSi photoemissive detector with black silicon light-trapping," J. Appl. Phys. 114, 183102 (2013).
170 M. Steglich, M. Zilk, F. Schrempel, A. Tünnermann, E.-B. Kley, "Improvement of Ge-on-Si photodiodes by black silicon trapping," Appl. Phys. Lett. 102, 111110 (2013).
169 M. Steglich, T. Käsebier, I. Höger, K. Füchsel, A. Tünnermann, E.-B. Kley, "Black Silicon nanostructures on silicon thin films prepared by reactive ion etching," Chin. Opt. Lett. 11, S10502 (2013).
168 M. Trost, S. Schroder, A. Duparre, S. Risse, T. Feigl, U. D. Zeitner, A. Tünnermann, "Structured Mo/Si multilayers for IR-suppression in laser-produced EUV light sources," Opt. Express 21 (23), 27852-27864 (2013).
167 R. Nawrodt, C. Schwarz, S. Kroker, I. W. Martin, R. Bassiri, F. Brückner, L. Cunningham, G. D. Hammond, D. Heinert, J. Hough, T. Käsebier, E. B. Kley, R. Neubert, S. Reid, S. Rowan, P. Seidel, A. Tünnermann, "Investigation of mechanical losses of thin silicon flexures at low temperatures," Class. Quantum Gravity 30 (11), 115008 (2013).
166 S. Diziain, R. Geiss, M. Zilk, F. Schrempel, E. B. Kley, A. Tünnermann, T. Pertsch, "Second harmonic generation in free-standing lithium niobate photonic crystal L3 cavity," Appl. Phys. Lett. 103 (5), 051117 (2013).
165 S. Kroker, T. Käsebier, E. B. Kley, A. Tünnermann, "Coupled grating reflectors with highly angular tolerant reflectance," Opt. Lett. 38 (17), 3336-3339 (2013).
164 S. Kroker, T. Käsebier, S. Steiner, E. B. Kley, A. Tünnermann, "High efficiency two-dimensional grating reflectors with angularly tunable polarization efficiency," Appl. Phys. Lett. 102 (16), 161111 (2013).
163 T. W. H. Oates, B. Dastmalchi, C. Helgert, L. Reissmann, U. Hübner, E. B. Kley, M. A. Verschuuren, I. Bergmair, T. Pertsch, K. Hingerl, K. Hinrichs, "Optical activity in sub-wavelength metallic grids and fishnet metamaterials in the conical mount," Opt. Mater. Express 3 (4), 439-451 (2013).
162 W. Eckstein, E. B. Kley, A. Tünnermann, "Comparison of different simulation methods for effective medium computer generated holograms," Opt. Express 21 (10), 12424-12433 (2013).
161 A. Szameit, Y. Shechtman, E. Osherovich, E. Bullkich, P. Sidorenko, H. Dana, S. Steiner, E.-B. Kley, S. Gazit, T. Cohen-Hyams, S. Shoham, M. Zibulevsky, I. Yavneh, Y. C. Eldar, O. Cohen, M. Segev, "Sparsity-based single-shot subwavelength coherent diffractive imaging," Nat. Mater. 11 (5), 455-459 (2012).
160 B. Sathyaprakash, E.-B. Kley, S. Kroker, K. Yamamoto, et. al., "Scientific objectives of Einstein Telescope," Class. Quantum Gravity 29, 124013 (2012).
159 B. Walther, C. Helgert, C. Rockstuhl, F. Setzpfandt, F. Eilenberger, E.-B. Kley, F. Lederer, A. Tünnermann,T. Pertsch, "Spatial and spectral light shaping with metamaterials," Adv. Mater. 24 (47), 6300-6304 (2012).
158 C. Braig, L. Fritzsch, T. Käsebier, E. B. Kley, C. Laubis, Y. Liu, F. Scholze, A. Tünnermann, "An EUV beamsplitter based on conical grazing incidence diffraction," Opt. Express 20 (2), 1825-1838 (2012).
157 C. Helgert, K. Dietrich, D. Lehr, T. Käsebier, T. Pertsch, E.-B. Kley, "A dedicated multilayer technique for the fabrication of three-dimensional metallic nanoparticles," Microelectron. Eng. 97, 181-184 (2012).
156 C. Pacholski, C. Morhard, J. P. Spatz, D. Lehr, M. Schulze, E.-B. Kley, A. Tünnermann, M. Helgert, M. Sundermann, R. Brunner, "Antireflective subwavelength structures on microlens arrays-comparison of various manufacturing techniques," Appl. Optics 51 (1), 8-14 (2012).
155 C. Schmidt, M. Liebsch, A. E. Klein, N. Janunts, A. Chipouline, T. Käsebier, C. Etrich, F. Lederer, E.-B. Kley, A. Tünnermann, T. Pertsch, "Near-field mapping of optical eigenstates in coupled disk microresonators," Phys. Rev. A 85, 033827 (2012).
154 D. Lehr, K. Dietrich, C. Helgert, T. Käsebier, H.-J. Fuchs, A. Tünnermann, E.-B. Kley, "Plasmonic properties of aluminum nanorings generated by double patterning," Opt. Lett. 37 (2), 157-159 (2012).
153 F. Burmeister, S. Steenhusen, R. Houbertz, U. D. Zeitner, S. Nolte, A. Tünnermann, "Materials and technologies for fabrication of three-dimensional microstructures with sub-100 nm feature sizes by two-photon polymerization," J. Laser Appl. 24(4), 042014 (2012).
152 F. Burmeister, U.D. Zeitner, S. Nolte, A. Tünnermann, "High numerical aperture hybrid optics for two-photon polymerization," Opt. Express 20 (7), 7994-8005 (2012).
151 G. Kalkowski, U. Zeitner, T. Benkenstein, J. Fuchs, C. Rothhardt, R. Eberhardt, "Direct wafer bonding for encapsulation of fused silica optical gratings," Microelectron. Eng. 97, 177-180 (2012).
150 I. Bergmair, W. Hackl, M. Losurdo, C. Helgert, G. Isic, M. Rohn, M. M. Jakovljevic, T. Mueller, M. Giangregorio, E.-B. Kley, T. Fromherz, R. Gajic, T. Pertsch, G. Bruno, M. Muehlberger, "Nano- and microstructuring of graphene using UV-NIL," NanoTechnology 23, 335301 (2012).
149 J. Reinhold, M. R. Shcherbakov, A. Chipouline, V. I. Panov, C. Helgert, T. Paul, C. Rockstuhl, F. Lederer, E.-B. Kley, A. Tünnermann, A.A. Fedyanin, T. Pertsch, "Contribution of the magnetic resonance to the third harmonic generation from a fishnet metamaterial," Phys. Rev. B 86, 115401 (2012).
148 K. Dietrich, D. Lehr, C. Helgert, A. Tünnermann, E.-B. Kley, "Circular Dichroism from Chiral Nanomaterial Fabricated by On-Edge Lithography," Adv. Mater. 24 (44), OP321-OP325 (2012).
147 M. Britzger, A. Khalaidovski, B. Hemb, E. B. Kley, F. Brückner, R. H. Rinkleff, K. Danzmann, R. Schnabel, "External-cavity diode laser in second-order Littrow configuration," Opt. Lett. 37 (15), 3117-3119 (2012).
146 M. Britzger, M. H. Wimmer, A. Khalaidovski, D. Friedrich, S. Kroker, F. Brückner, E.-B. Kley, A. Tünnermann, K. Danzmann, R. Schnabel, "Michelson interferometer with diffractively-coupled arm resonators in second-order Littrow configuration," Opt. Express 20 (23), 25400-25408 (2012).
145 M. Losurdo, I. Bergmair, M.M. Giangregorio, B. Dastmalchi, G.V. Bianco, C. Helgert, E. Pshenay-Severin, M. Falkner, T. Pertsch, E.-B. Kley, U. Hübner, M.A. Verschuuren, M. Mühlberger, K. Hingerl, G. Bruno, "Enhancing chemical and optical stability of Silver nanostructures by low-temperature Hydrogen atoms processing," J. Phys. Chem. C 116 (43), 23004-23012 (2012).
144 M. Oliva, D. Michaelis, P. Dannberg, M. Jozwik, K. Lizewski, M. Kujawinska, U.D. Zeitner, "Twyman-Green-type integrated laser interferometer array for parallel MEMS testing," J. Microelectromech. Syst. 22, 015018 (2012).
143 M. Schulze, M. Damm, M. Helgert, E.-B. Kley, S. Nolte, A. Tünnermann, "Durability of stochastic antireflective structures - analyses on damage thresholds and adsorbate elimination," Opt. Express 20 (16), 18348-18355 (2012).
142 S. Babin, G. Glushenko, T. Weber, T. Käsebier, A. Szeghalmi, E.-B. Kley, "Application of double patterning technology to fabricate optical elements: Process simulation, fabrication, and measurement," J. Vac. Sci. Technol. B 30, 031605 (2012).
141 S. Richter, A. Plech, M. Steinert, M. Heinrich, S. Döring, F. Zimmermann, U. Peschel, E.-B. Kley, A. Tünnermann, S. Nolte, "On the fundamental structure of femtosecond laser-induced nanogratings," Laser Photon. Rev. 6 (6), 787-792 (2012).
140 S. Steiner, S. Kroker, T. Käsebier, E.-B. Kley, A. Tünnermann, "Angular bandpass filters based on dielectric resonant waveguide gratings," Opt. Express 20 (20), 22555-22562 (2012).
139 T. W. H. Oates, B. Dastmalchi, G. Isic, S. Tollabimazraehno, C. Helgert, T. Pertsch, E.-B. Kley, M. A. Verschuuren, I. Bergmair, K. Hingerl , "Oblique incidence ellipsometric characterization and the substrate dependence of visible frequency fishnet metamaterials," Opt. Express 20 (10), 11166-11177 (2012).
138 T. Weber, T. Käsebier, A. Szeghalmi, M. Knez, E.-B. Kley, A. Tünnermann, "High aspect ratio deep UV wire grid polarizer fabricated by double patterning," Microelectron. Eng. 98, 433-435 (2012).
137 T. Weber, T. Käsebier, M. Helgert, E.-B. Kley, A. Tünnermann, "Tungsten wire grid polarizer for applications in the DUV spectral range," Appl. Optics 51 (16), 3224-3227 (2012).
136 U.D. Zeitner, M. Oliva, F. Fuchs, D. Michaelis, T. Benkenstein, T. Harzendorf, E.-B. Kley, "High-performance diffraction gratings made by e-beam lithography," Appl. Phys. A-Mater. Sci. Process. 4, 789-796 (2012).
135 U.D. Zeitner, M. Oliva, F. Fuchs, D. Michaelis, T. Benkenstein, T. Harzendorf, E.-B. Kley, "High-performance diffraction gratings made by e-beam lithography," Appl. Phys. A-Mater. Sci. Process. 109 (4), 789-796 (2012).
134 Y. Jourlin, S. Tonchev, O. Parriaux, J. Sauvage-Vincent, T. Harzendorf, U. Zeitner, "Waveguide Grating Radial Polarizer for the Photolithography of Circularly Symmetrical Optical Elements," IEEE Photonics J. 4, 1728-1736 (2012).
133 B. W. Barr, M. P. Edgar, J. Nelson, M. V. Plissi, S. H. Huttner, B. Sorazu, K. A. Strain, O. Burmeister, M. Britzger, D. Friedrich, R. Schnabel, K. Danzmann, J. Hallam, A. Freise, T. Clausnitzer, F. Brückner, E. B. Kley, A. Tünnermann, "Translational, rotational, and vibrational coupling into phase in diffractively coupled optical cavities," Opt. Lett. 36 (14), 2746-2748 (2011).
132 C. Braig, P. Predehl, E.-B. Kley, "Efficient extreme ultraviolet transmission gratings for plasma diagnostics," Opt. Eng. 50 (6), 66501 (2011).
131 C. Braig, T. Käsebier, E. B. Kley, A. Tünnermann, "Stand-alone diamond binary phase transmission gratings for the EUV band," Opt. Express 19 (15), 14008-14017 (2011).
130 C. Helgert, C. Rockstuhl, C. Etrich, E. B. Kley, A. Tünnermann, F. Lederer, T. Pertsch, "Effects of anisotropic disorder in an optical metamaterial," Appl. Phys. A-Mater. Sci. Process. 103 (3), 591-595 (2011).
129 C. Helgert, E. Pshenay-Severin, M. Falkner, C. Menzel, C. Rockstuhl, E.-B. Kley, A. Tünnermann, F. Lederer, T. Pertsch, "Chiral Metamaterial Composed of Three-Dimensional Plasmonic Nanostructures," Nano Lett. 11 (10), 4400-4404 (2011).
128 C. Kern, M. Zuerch, J. Petschulat, T. Pertsch, B. Kley, T. Käsebier, U. Hübner, C. Spielmann, "Comparison of femtosecond laser-induced damage on unstructured vs. nano-structured Au-targets," Appl. Phys. A-Mater. Sci. Process. 104 (1), 15-21 (2011).
127 C. Schmidt, A. Chipouline, T. Käsebier, E. B. Kley, A. Tünnermann, T. Pertsch, "Temperature induced nonlinearity in coupled microresonators," Appl. Phys. A-Mater. Sci. Process. 104 (3), 503-511 (2011).
126 D. Friedrich, B. W. Barr, F. Brückner, S. Hild, J. Nelson, J. Macarthur, M. V. Plissi, M. P. Edgar, S. H. Huttner, B. Sorazu, S. Kroker, M. Britzger, E.-B. Kley, K. Danzmann, A. Tünnermann, K. A. Strain, R. Schnabel, "Waveguide grating mirror in a fully suspended 10 meter Fabry-Perot cavity," Opt. Express 19 (16), 14955-14963 (2011).
125 F. Brückner, S. Kroker, D. Friedrich, E.-B. Kley, A. Tünnermann, "Widely tunable monolithic narrowband grating filter for near-infrared radiation," Opt. Lett. 36 (4), 436-438 (2011).
124 G. Andriukaitis, D. Kartashov, D. Lorenc, A. Pugzlys, A. Baltuska, L. Giniunas, R. Danielius, J. Limpert, T. Clausnitzer, E. B. Kley, A. Voronin, A. Zheltikov, "Hollow-fiber compression of 6 mJ pulses from a continuous-wave diode-pumped single-stage Yb, Na:CaF(2) chirped pulse amplifier," Opt. Lett. 36 (10), 1914-1916 (2011).
123 I. Bergmair, B. Dastmalchi, M. Bergmair, A. Saeed, W. Hilber, G. Hesser, C. Helgert, E. Pshenay-Severin, T. Pertsch, E. B. Kley, U. Hübner, N. H. Shen, R. Penciu, M. Kafesaki, C. M. Soukoulis, K. Hingerl, M. Muehlberger, R. Schoeftner, "Single and multilayer metamaterials fabricated by nanoimprint lithography," NanoTechnology 22 (32), 325301 (2011).
122 I. Bergmair, B. Dastmalchi, M. Bergmair, A. Saeed, W. Hilber, G. Hesser, C. Helgert, E. Pshenay-Severin, T. Pertsch, E.-B. Kley, U. Hübner, N.H. Shen, R. Penciu, M. Kafesaki, C.M. Soukoulis, K. Hingerl, M. Mühlberger, R. Schoeftner, "Metamaterials fabricated by Nanoimprint Lithography," NanoTechnology 22, 325301 (2011).
121 M. Britzger, D. Friedrich, S. Kroker, F. Brückner, O. Burmeister, E.-B. Kley, A. Tünnermann, K. Danzmann, R. Schnabel, "Pound-Drever-Hall error signals for the length control of three-port grating coupled cavities," Appl. Optics 50 (22), 4340-4346 (2011).
120 M. Britzger, D. Friedrich, S. Kroker, F. Brückner, O. Burmeister, E.-B. Kley, A. Tünnermann, K. Danzmann, R. Schnabel, "Diffractively coupled Fabry-Perot resonator with power-recycling," Opt. Express 19 (16), 14964-14975 (2011).
119 M. Mayer, C. Grevent, A. Szeghalmi, M. Knez, M. Weigand, S. Rehbein, G. Schneider, B. Baretzky, G. Schütz, "Multilayer Fresnel zone plate for soft X-ray microscopy resolves sub 39-nm structures," UltraMicroscopy 111, 1706-1711 (2011).
118 M. Oliva, T. Harzendorf, D. Michaelis, U. D. Zeitner, A. Tünnermann, "Multilevel blazed gratings in resonance domain: an alternative to the classical fabrication approach," Opt. Express 19 (15), 14735-14745 (2011).
117 M. Schulze, D. Lehr, M. Helgert, E.-B. Kley, A. Tünnermann, "Transmission enhanced optical lenses with self-organized antireflective subwavelength structures for the UV range," Opt. Lett. 36 (19), 3924-3926 (2011).
116 S. Kroker, F. Brückner, E.-B. Kley, A. Tünnermann, "Enhanced angular tolerance of resonant waveguide grating reflectors," Opt. Lett. 36 (4), 537-539 (2011).
115 S. Kroker, T. Käsebier, F. Brückner, F. Fuchs, E.-B. Kley, A. Tünnermann, "Reflective cavity couplers based on resonant waveguide gratings," Opt. Express 19 (17), 16466-16479 (2011).
114 T. Weber, T. Käsebier, A. Szeghalmi, M. Knez, E.-B. Kley, A. Tünnermann, , "Iridium wire grid polarizer fabricated using atomic layer deposition," Nanoscale Res. Lett. 6, 558 (2011).
113 T. Weber, T. Käsebier, E.-B. Kley, A. Tünnermann, "Broadband iridium wire grid polarizer for UV applications," Opt. Lett. 36 (4), 445-447 (2011).
112 W. Freese, T. Kämpfe, W. Rockstroh, E.-B. Kley, A. Tünnermann, "Optimized electron beam writing strategy for fabricating computer-generated holograms based on an effective medium approach," Opt. Express 19 (9), 8684-8692 (2011).
111 Y.-Y. Yang, F. Suessmann, S. Zherebtsov, I. Pupeza, J. Kaster, D. Lehr, H.-J. Fuchs, E.-B. Kley, E. Fill, X.-M. Duan, Z.-S. Zhao, F. Krausz, S. L. Stebbings, M. F. Kling, "Optimization and characterization of a highly-efficient diffraction nanograting for MHz XUV pulses," Opt. Express 19 (3), 1954-1962 (2011).
110 A. Szeghalmi, E. B. Kley, M. Knez, "Theoretical and Experimental Analysis of the Sensitivity of Guided Mode Resonance Sensors," J. Non-Cryst. Solids 114 (49), 21150-21157 (2010).
109 C. Menzel, C. Helgert, C. Rockstuhl, E. B. Kley, A. Tünnermann, T. Pertsch, F. Lederer, "Asymmetric Transmission of Linearly Polarized Light at Optical Metamaterials," Phys. Rev. Lett. 104 (25), 253902 (2010).
108 C. Schmidt, A. Chipouline, T. Käsebier, E.-B. Kley, A. Tünnermann, T. Pertsch, "Thermal nonlinear effects in hybrid silica/polymer microdisks," Opt. Lett. 35 (20), 3351-3353 (2010).
107 F. Brückner, D. Friedrich, T. Clausnitzer, M. Britzger, O. Burmeister, K. Danzmann, E.-B. Kley, A. Tünnermann, and R. Schnabel, "Realization of a Monolithic High-Reflectivity Cavity Mirror from a Single Silicon Crystal," Phys. Rev. Lett. 104 (16), (2010).
106 H. Hartung, E.-B. Kley, T. Gischkat, F. Schrempel, W. Wesch, A. Tünnermann, "Ultra thin high index contrast photonic crystal slabs in lithium niobate," Opt. Mater. 33 (1), 19-21 (2010).
105 I. Bergmair, M. Muehlberger, K. Hingerl, E. Pshenay-Severin, T. Pertsch, E. B. Kley, H. Schmidt, R. Schoeftner, "3D materials made of gold using Nanoimprint Lithography," Microelectron. Eng. 87 (5-8), 1008-1010 (2010).
104 J. Petschulat, C. Helgert, M. Steinert, N. Bergner, C. Rockstuhl, F. Lederer, T. Pertsch, A. Tünnermann, E.-B. Kley, "Plasmonic modes of extreme subwavelength nanocavities," Opt. Lett. 35 (16), 2693-2695 (2010).
103 L. Stürzebecher, T. Harzendorf, U. Vogler, U.D. Zeitner, R. Voelkel, "Advanced mask aligner lithography: fabrication of periodic patterns using pinhole array mask and Talbot effect," Opt. Express 18, 19485-19494 (2010).
102 M. P. Edgar, B. W. Barr, J. Nelson, M. V. Plissi, K. A. Strain, O. Burmeister, M. Britzger, K. Danzmann, R. Schnabel, T. Clausnitzer, F. Brückner, E.-B. Kley, A. Tünnermann, "Experimental demonstration of a suspended, diffractively coupled Fabry-Perot cavity," ChemPhysChem 27 (8), (2010).
101 R. Geiss, S. Diziain, R. Iliew, C. Etrich, H. Hartung, N. Janunts, F. Schrempel, F. Lederer, T. Pertsch, E. B. Kley, "Light propagation in a free-standing lithium niobate photonic crystal waveguide," Appl. Phys. B-Lasers Opt. 97 (13), 131109 (2010).
100 R. Voelkel, U. Vogler, A. Bich, P. Pernet, K.J. Weible, M. Hornung, R. Zoberbier, E. Cullmann, L. Stürzebecher, T. Harzendorf, U.D. Zeitner, "Advanced Mask Aligner Lithography: New Illumination System," Opt. Express 18, 20968-20978 (2010).
99 W. Freese, T. Kämpfe, E.-B. Kley, A. Tünnermann, "Design of binary subwavelength multiphase level computer generated holograms," Opt. Lett. 35 (5), 676-678 (2010).
98 Y. Liu, H.-J. Fuchs, Z. Liu, H. Chen, S. He, S. Fu, E.-B. Kley, A. Tünnermann, "Investigation on the properties of a laminar grating as a soft x-ray beam splitter," Appl. Optics 49 (23), 4450-4459 (2010).
97 C. Brückner, T. Käsebier, B. Pradarutti, S. Riehemann, G. Notni, E.-B. Kley, A. Tünnermann, "Broadband antireflective structures applied to high resistive float zone silicon in the THz spectral range," Opt. Express 17 (5), 3063-3077 (2009).
96 C. Helgert, C. Menzel, C. Rockstuhl, E. Pshenay-Severin, E. B. Kley, A. Chipouline, A. Tünnermann, F. Lederer, T. Pertsch, "Polarization-independent negative-index metamaterial in the near infrared," Opt. Lett. 34 (5), 704-706 (2009).
95 C. Helgert, C. Rockstuhl, C. Etrich, C. Menzel, E.-B. Kley, A. Tünnermann, F. Lederer, T. Pertsch, "Effective properties of amorphous metamaterials," Phys. Rev. B 79 (23), 233107 (2009).
94 C. Menzel, C. Helgert, J. Uepping, C. Rockstuhl, E. B. Kley, R. B. Wehrspohn, T. Pertsch, F. Lederer, "Angular resolved effective optical properties of a Swiss cross metamaterial," Appl. Phys. B-Lasers Opt. 95 (13), 131104 (2009).
93 C. Schmidt, A. Chipouline, T. Käsebier, E. B. Kley, A. Tünnermann, T. Pertsch, V. Shuvayev, L. I. Deych, "Observation of optical coupling in microdisk resonators," Phys. Rev. A 80 (4), 043841 (2009).
92 D. J. Vine, D. M. Paganin, K. M. Pavlov, K. Uesugi, A. Takeuchi, Y. Suzuki, N. Yagi, T. Kämpfe, E.-B. Kley, E. Foerster, "Deterministic Retrieval of Complex Green's Functions Using Hard X Rays," Phys. Rev. Lett. 102 (4), (2009).
91 F. Brückner, D. Friedrich, M. Britzger, T. Clausnitzer, O. Burmeister, E.-B. Kley, K. Danzmann, A. Tünnermann, R. Schnabel, "Encapsulated subwavelength grating as a quasi-monolithic resonant reflector," Opt. Express 17 (26), 24334-24341 (2009).
90 F. Brückner, D. Friedrich, T. Clausnitzer, O. Burmeister, M. Britzger, E.-B. Kley, K. Danzmann, A. Tünnermann, R. Schnabel, "Demonstration of a cavity coupler based on a resonant waveguide grating," Opt. Express 17 (1), 163-169 (2009).
89 F. Schrempel, T. Gischkat, H. Hartung, T. Hoeche, E.-B. Kley, A. Tünnermann, W. Wesch, "Ultrathin membranes in x-cut lithium niobate," Opt. Lett. 34 (9), 1426-1428 (2009).
88 I. Bergmair, M. Muehlberger, W. Schwinger, K. Hingerl, E. B. Kley, H. Schmidt, R. Schoeftner, "Reversal mu CP using hard stamps," Microelectron. Eng. 86 (4-6), 650-653 (2009).
87 M. P. Edgar, B. W. Barr, J. Nelson, M. V. Plissi, K. A. Strain, O. Burmeister, M. Britzger, K. Danzmann, R. Schnabel, T. Clausnitzer, F. Brückner, E. B. Kley, A. Tünnermann, "Experimental demonstration of a suspended diffractively coupled optical cavity," Opt. Lett. 34 (20), 3184-3186 (2009).
86 S. Babin, A. Bugrov, S. Cabrini, S. Dhuey, A. Goltsov, I. Ivonin, E. B. Kley, C. Peroz, H. Schmidt, V. Yankov, "Digital optical spectrometer-on-chip," Appl. Phys. B-Lasers Opt. 95 (4), (2009).
85 S. Babin, C. Peroz, A. Bugrov, A. Goltsov, I. Ivonin, V. Yankov, S. Dhuey, S. Cabrini, E. B. Kley, H. Schmidt, "Fabrication of novel digital optical spectrometer on chip," J. Opt. Soc. Am. B-Opt. Phys. 27 (6), 3187-3191 (2009).
84 T. Gischkat, H. Hartung, F. Schrempel, E. B. Kley, A. Tünnermann, W. Wesch, "Patterning of LiNbO(3) by means of ion irradiation using the electronic energy deposition and wet etching," Microelectron. Eng. 86 (4-6), 910-912 (2009).
83 A. K. Bansal, W. Holzer, A. Penzkofer, E. B. Kley, "Spectroscopic and lasing characterisation of a dicarbazovinylene-MEH-benzene dye," Opt. Commun. 281 (14), 3806-3819 (2008).
82 A. K. Bansal, W. Holzer, A. Penzkofer, H.-H. Hoerhold, E. Klemm, W. Frank, E. B. Kley, "Spectroscopic and lasing characterisation of a luminescent phenylene/bipyridine polymer," Synth. Met. 158 (19-20), 758-766 (2008).
81 D. Friedrich, O. Burmeister, A. Bunkowski, T. Clausnitzer, S. Fahr, E.-B. Kley, A. Tünnermann, K. Danzmann, R. Schnabel, "Diffractive beam splitter characterization via a power-recycled interferometer," Opt. Lett. 33 (2), 101-103 (2008).
80 F. Brückner, T. Clausnitzer, O. Burmeister, D. Friedrich, E.-B. Kley, K. Danzmann, A. Tünnermann, R. Schnabel, "Monolithic dielectric surfaces as new low-loss light-matter interfaces," Opt. Lett. 33 (3), 264-266 (2008).
79 H. Hartung, E.-B. Kley, A. Tünnermann, T. Gischkat, F. Schrempel, W. Wesch, "Fabrication of ridge waveguides in zinc-substituted lithium niobate by means of ion-beam enhanced etching," Opt. Lett. 33 (20), 2320-2322 (2008).
78 P. Hoyer, M. Theuer, R. Beigang, E. B. Kley, "Terahertz emission from black silicon," Appl. Phys. B-Lasers Opt. 93 (9), (2008).
77 R. Heming, L.-C. Wittig, P. Dannberg, J. Jahns, E.-B. Kley, M. Gruber, "Efficient Planar-Integrated Free-Space Optical Interconnects Fabricated by a Combination of Binary and Analog Lithography," J. Lightwave Technol. 26 (13-16), 2136-2141 (2008).
76 T. Clausnitzer, T. Kämpfe, E. B. Kley, A. Tünnermann, A. V. Tishchenko, O. Parriaux, "Highly-dispersive dielectric transmission gratings with 100% diffraction efficiency," Opt. Express 16 (8), 5577-5584 (2008).
75 T. Clausnitzer, T. Kämpfe, F. Brückner, R. Heinze, E.-B. Kley, A. Tünnermann, "Reflection-reduced encapsulated transmission grating," Opt. Lett. 33 (17), 1972-1974 (2008).
74 T. Kämpfe, E.-B. Kley, A. Tünnermann, "Designing multiplane computer-generated holograms with consideration of the pixel shape and the illumination wave," J. Opt. Soc. Am. A-Opt. Image Sci. Vis. 25 (7), 1609-1622 (2008).
73 U. D. Zeitner, M. Banasch, E.-B. Kley, "The making of a computer-generated hologram," Photon. Spect. 42 (12), 58-61 (2008).
72 D. Radtke, J. Duparre, U. D. Zeitner, A. Tünnermann, "Laser lithographic fabrication and characterization of a spherical artificial compound eye," Opt. Express 15 (6), 3067-3077 (2007).
71 J. A. Fueloep, Z. Major, A. Henig, S. Kruber, R. Weingartner, T. Clausnitzer, E.-B. Kley, A. Tünnermann, V. Pervak, A. Apolonski, J. Osterhoff, R. Hoerlein, F. Krausz, S. Karsch, "Short-pulse optical parametric chirped-pulse amplification for the generation of high-power few-cycle pulses," New J. Phys. 9, (2007).
70 J. Thomas, E. Wikszak, T. Clausnitzer, U. Fuchs, U. Zeitner, S. Nolte, A. Tünnermann, "Inscription of fiber Bragg gratings with femtosecond pulses using a phase mask scanning technique," Appl. Phys. A-Mater. Sci. Process. 86 (2), 153-157 (2007).
69 M. Muehlberger, I. Bergmair, W. Schwinger, M. Gmainer, R. Schoeftner, T. Glinsner, C. Hasenfuss, K. Hingerl, M. Vogler, H. Schmidt, E. B. Kley, "A Moire method for high accuracy alignment in nanoimprint lithography," Microelectron. Eng. 84 (5-8), 925-927 (2007).
68 M. Vogler, S. Wiedenberg, M. Muehlberger, I. Bergmair, T. Glinsner, H. Schmidt, E.-B. Kley, G. Gruetzner, "Development of a novel, low-viscosity UV-curable polymer system for UV-nanoimprint lithography," Microelectron. Eng. 84 (5-8), 984-988 (2007).
67 R. Iliew, C. Etrich, M. Augustin, E. B. Kley, S. Nolte, A. Tünnermann, F. Lederer, "Linear and nonlinear effects of light propagation in low-index photonic crystal slabs," Phys. Status Solidi A-Appl. Mat. 204 (11), 3689-3707 (2007).
66 R. Nawrodt, A. Zimmer, T. Koettig, T. Clausnitzer, A. Bunkowski, E. B. Kley, R. Schnabel, K. Danzmann, S. Nietzsche, W. Vodel, A. Tünnermann, P. Seidel, "Mechanical Q-factor measurements on a test mass with a structured surface," New J. Phys. 9, (2007).
65 S. Fahr, T. Clausnitzer, E.-B. Kley, A. Tünnermann, "Reflective diffractive beam splitter for laser interferometers," Appl. Optics 46 (24), 6092-6095 (2007).
64 T. Clausnitzer, T. Kämpfe, E.-B. Kley, A. Tünnermann, A. Tishchenko, O. Parriaux, "Investigation of the polarization-dependent diffraction of deep dielectric rectangular transmission gratings illuminated in Littrow mounting," Appl. Optics 46 (6), 819-826 (2007).
63 T. Glinsner, P. Lindner, M. Muehlberger, I. Bergmair, R. Schoeftner, K. Hingerl, H. Schmid, E.-B. Kley, "Fabrication of 3D-photonic crystals via UV-nanoimprint lithography," J. Opt. Soc. Am. B-Opt. Phys. 25 (6), 2337-2340 (2007).
62 T. Kämpfe, E.-B. Kley, A. Tünnermann, P. Dannberg, "Design and fabrication of stacked, computer generated holograms for multicolor image generation," Appl. Optics 46 (22), 5482-5488 (2007).
61 A. Bunkowski, O. Burmeister, K. Danzmann, R. Schnabel, T. Clausnitzer, E. B. Kley, A. Tünnermann, "Demonstration of three-port grating phase relations," Opt. Lett. 31 (16), 2384-2386 (2006).
60 F. Schrempel, T. Gischkat, H. Hartung, E. B. Kley, W. Wesch, "Ion beam enhanced etching of LiNbO3," Nucl. Instrum. Methods Phys. Res. Sect. B-Beam Interact. Mater. Atoms 250, 164-168 (2006).
59 M. Augustin, R. Iliew, C. Etrich, F. Setzpfandt, H.-J. Fuchs, E.-B. Kley, S. Nolte, T. Pertsch, F. Lederer, A. Tünnermann, "Dispersion properties of photonic crystal waveguides with a low in-plane index contrast," New J. Phys. 8, 210 (2006).
58 U. Fuchs, U. Zeitner, A. Tünnermann, "Hybrid optics for focusing ultrashort laser pulses," Opt. Lett. 31 (10), 1516-1518 (2006).
57 M. Augustin, R. Iliew, C. Etrich, D. Schelle, H. Fuchs, U. Peschel, S. Nolte, E. Kley, F. Lederer, A. Tünnermann, "Self-guiding of infrared and visible light in photonic crystal slabs," Appl. Phys. A-Mater. Sci. Process. 81 (2-3), 313-319 (2005).
56 S. Wise, V. Quetschke, A. Deshpande, G. Müller, D. Reitze, D. Tanner, B. Whiting, Y. Chen, A. Tünnermann, E. Kley, T. Clausnitzer, "Phase effects in the diffraction of light: Beyond the grating equation," Phys. Rev. Lett. 95 (1), 013901 (2005).
55 T. Clausnitzer, A. Tishchenko, E. Kley, H. Fuchs, D. Schelle, "Narrowband, polarization-independent free-space wave notch filter," J. Opt. Soc. Am. A-Opt. Image Sci. Vis. 22 (12), 2799-2803 (2005).
54 T. Clausnitzer, E. Kley, A. Tünnermann, A. Bunkowski, O. Burmeister, K. Danzmann, R. Schnabel, S. Gliech, A. Duparre, "Ultra low-loss low-efficiency diffraction gratings," Opt. Express 13 (12), 4370-4378 (2005).
53 T. Clausnitzer, T. Kampfe, E. Kley, A. Tünnermann, U. Peschel, A. Tishchenko, O. Parriaux, "An intelligible explanation of highly-efficient diffraction in deep dielectric rectangular transmission gratings," Opt. Express 13 (26), 10448-10456 (2005).
52 T. Kaempfe, E.-B. Kley, A. Tünnermann, "Design and fabrication of refractive and diffractive micro optical elements used in holographic recording setups," 5965 (596503) (2005).
51 U. Fuchs, U. Zeitner, A. Tünnermann, "Ultra-short pulse propagation in complex optical systems," Opt. Express 13 (10), 3852-3861 (2005).
50 A. Bunkowski, O. Burmeister, P. Beyersdorf, K. Danzmann, R. Schnabel, T. Clausnitzer, E. Kley, A. Tünnermann, "Low-loss grating for coupling to a high-finesse cavity," Opt. Lett. 29 (20), 2342-2344 (2004).
49 B. Schnabel, K. Gunther, H. Eichhorn, J. Gramss, D. Beyer, E. Kley, W. Rockstroh, "Fast data preparation for high-quality and large-area computer generated hologram fabrication," Microelectron. Eng. 73-4 (SI), 80-84 (2004).
48 H. Elfstrom, T. Vallius, M. Kuittinen, J. Turunen, T. Clausnitzer, E. Kley, "Diffractive elements with novel antireflection film stacks," Opt. Express 12 (25), 6385-6390 (2004).
47 M. Augustin, H. Fuchs, D. Schelle, E. Kley, S. Nolte, A. Tünnermann, R. Iliew, C. Etrich, U. Peschel, F. Lederer, "High transmission and single-mode operation in low-index-contrast photonic crystal waveguide devices," Appl. Phys. B-Lasers Opt. 84 (5), 663-665 (2004).
46 M. Augustin, R. Iliew, H. Fuchs, U. Peschel, E. Kley, S. Nolte, F. Lederer, A. Tünnermann, "Investigation of photonic crystals with a low in-plane index contrast," Jpn. J. Appl. Phys. 43 (8B), 5805-5808 (2004).
45 R. Iliew, C. Etrich, U. Peschel, F. Lederer, M. Augustin, H. Fuchs, D. Schelle, E. Kley, S. Nolte, A. Tünnermann, "Diffractionless propagation of light in a low-index photonic-crystal film," Appl. Phys. B-Lasers Opt. 85 (24), 5854-5856 (2004).
44 W. Holzer, A. Penzkofer, A. Lux, H. Horhold, E. Kley, "Photo-physical and lasing characterisation of neat films of a thianthrene-substituted distyrylbenzene dye (Thianthrene-DSB)," Synth. Met. 145 (2-3), 119-127 (2004).
43 E. Werner, J. Ruske, B. Zeitner, W. Biehlig, A. Tünnermann, "Integrated-optical amplitude modulator for high power applications," Opt. Commun. 221 (1-3), 9-12 (2003).
42 J. Limpert, T. Clausnitzer, A. Liem, T. Schreiber, H. Fuchs, H. Zellmer, E. Kley, A. Tünnermann, "High-average-power femtosecond fiber chirped-pulse amplification system," Opt. Lett. 28 (20), 1984-1986 (2003).
41 J. Ruske, B. Zeitner, A. Tünnermann, A. Rasch, "Photorefractive effect and high power transmission in LiNbO3 channel waveguides," C. R. Phys. 39 (14), 1048-1050 (2003).
40 J. Ruske, E. Werner, B. Zeitner, A. Tünnermann, "Integrated optical ultrashort-pulse picker with high extinction ratio," C. R. Phys. 39 (20), 1442-1443 (2003).
39 L. Wittig, E. Kley, A. Tünnermann, "Micro- and nanostructured optics," Electron. Lett. 76 (C2), 41-46 (2003).
38 M. Augustin, H. Fuchs, D. Schelle, E. Kley, S. Nolte, A. Tünnermann, R. Iliew, C. Etrich, U. Peschel, F. Lederer, "Highly efficient waveguide bends in photonic crystal with a low in-plane index contrast," Opt. Express 11 (24), 3284-3289 (2003).
37 R. Herda, A. Liem, B. Schnabel, A. Drauschke, H. Fuchs, E. Kley, H. Zellmer, A. Tünnermann, "Efficient side-pumping of fibre lasers using binary gold diffraction gratings," C. R. Phys. 39 (3), 276-277 (2003).
36 T. Clausnitzer, J. Limpert, K. Zollner, H. Zellmer, H. Fuchs, E. Kley, A. Tünnermann, M. Jupe, D. Ristau, "Highly efficient transmission gratings in fused silica for chirped-pulse amplification systems," Appl. Optics 42 (34), 6934-6938 (2003).
35 V. Yankov, S. Babin, I. Ivonin, A. Goltsov, A. Morozov, L. Polonskiy, M. Spector, A. Talapov, E. Kley, H. Schmidt, "Multiwavelength Bragg gratings and their application to optical MUX/DEMUX devices," IEEE Photonics Technol. Lett. 15 (3), 410-412 (2003).
34 C. Bauer, B. Schnabel, E. Kley, U. Scherf, H. Giessen, R. Mahrt, "Two-photon pumped lasing from a two-dimensional photonic bandgap structure with polymeric gain material," Adv. Eng. Mater. 14 (9), 673-676 (2002).
33 J. Limpert, T. Schreiber, T. Clausnitzer, K. Zollner, H. Fuchs, E. Kley, H. Zellmer, A. Tünnermann, "High-power femtosecond Yb-doped fiber amplifier," Opt. Express 10 (14), 628-638 (2002).
32 N. Moll, R. Mahrt, C. Bauer, H. Giessen, B. Schnabel, E. Kley, U. Scherf, "Erratum: Evidence for bandedge lasing in a two-dimensional photonic bandgap polymer laser ," Appl. Phys. B-Lasers Opt. 80 (14), 2610 (2002).
31 N. Moll, R. Mahrt, C. Bauer, H. Giessen, B. Schnabel, E. Kley, U. Scherf, "Evidence for bandedge lasing in a two-dimensional photonic bandgap polymer laser," Appl. Phys. B-Lasers Opt. 80 (5), 734-736 (2002).
30 T. Glaser, S. Schröter, H. Bartelt, H. Fuchs, E. Kley, "Diffractive optical isolator made of high-efficiency dielectric gratings only," Appl. Optics 41 (18), 3558-3566 (2002).
29 U. Grusemann, B. Zeitner, M. Rottschalk, J. Ruske, A. Tünnermann, A. Rasch, "Integrated-optical wavelength sensor with self-compensation of thermally induced phase shifts by use of a LiNbO3 unbalanced Mach-Zehnder interferometer," Appl. Optics 41 (29), 6211-6219 (2002).
28 W. Holzer, A. Penzkofer, T. Pertsch, N. Danz, A. Bräuer, E. Kley, H. Tillmann, C. Bader, H. Horhold, "Corrugated neat thin-film conjugated polymer distributed-feedback lasers," Appl. Phys. A-Mater. Sci. Process. 74 (4-5), 333-342 (2002).
27 B. Schnabel, E. Kley, "On the influence of the e-beam writer address grid on the optical quality of high-frequency gratings," Microelectron. Eng. 57-8, 327-333 (2001).
26 C. Bauer, H. Giessen, B. Schnabel, E. Kley, C. Schmitt, U. Scherf, R. Mahrt, "A surface-emitting circular grating polymer laser," Adv. Eng. Mater. 13 (15), 1161 (2001).
25 L. Wittig, A. Cumme, T. Harzendorf, E. Kley, "Intermittence effect in electron beam writing," Microelectron. Eng. 57-8, 321-326 (2001).
24 L.-C. Wittig, M. Cumme, S. Nolte, E.-B. Kley, A. Tünnermann, "Beam shaping for multimode beams," 4440(34) (2001).
23 L.-C. Wittig, M. Cumme, T. Harzendorf, E.-B. Kley, "Intermittence effect in electron beam writing," Microelectron. Eng. 57-58, 321-326 (2001).
22 M. Barge, S. Bruynooghe, F. Clube, A. Nobari, J. Saussol, E. Grass, H. Mayer, B. Schnabel, E. Kley, "120-nm lithography using off-axis TIR holography and 364 nm exposure wavelength," Microelectron. Eng. 57-8, 59-63 (2001).
21 S. Buhling, F. Wyrowski, E. Kley, A. Nellissen, L. Wang, M. Dirkzwager, "Resolution enhanced proximity printing by phase and amplitude modulating masks," J. Microelectromech. Syst. 11 (5), 603-611 (2001).
20 B. Schnabel, E. Kley, F. Wyrowski, "Study on polarizing visible light by subwavelength-period metal-stripe gratings," Opt. Eng. 38 (2), 220-226 (1999).
19 C. Gimkiewicz, D. Hagedorn, J. Jahns, E. Kley, F. Thoma, "Fabrication of microprisms for planar optical interconnections by use of analog gray-scale lithography with high-energy-beam-sensitive glass," Appl. Optics 38 (14), 2986-2990 (1999).
18 E.-B. Kley, L.-C. Wittig, M. Cumme, U.D. Zeitner, P. Dannberg, "Fabrication and properties of refractive micro-optical beam-shaping elements," 3879 (20) (1999).
17 L.-C. Wittig, E.-B. Kley, "Approximation of refractive micro-optical profiles by minimal surfaces," 3879 (32) (1999).
16 P. Dannberg, L. Erdmann, R. Bierbaum, A. Krehl, A. Bräuer, E. Kley, "Micro-optical elements and their integration to glass and optoelectronic wafers," Microsyst. Technol. 6 (2), 41-47 (1999).
15 U. Zeitner, B. Schnabel, E. Kley, F. Wyrowski, "Polarization multiplexing of diffractive elements with metal-stripe grating pixels," Appl. Optics 38 (11), 2177-2181 (1999).
14 U. Zeitner, F. Wyrowski, "High modal discrimination for laser resonators with Gaussian output beam," J. Mod. Opt. 46 (9), 1309-1314 (1999).
13 U. Zeitner, H. Aagedal, F. Wyrowski, "Comparison of resonator-originated and external beam shaping," Appl. Optics 38 (6), 980-986 (1999).
12 V. Pavelyev, V. Soifer, M. Duparre, R. Kowarschik, B. Ludge, B. Kley, "Iterative calculation, manufacture and investigation of DOE forming unimodal complex distribution," Opt. Lasers Eng. 29 (4-5), 269-279 (1998).
11 E. Kley, "Continuous profile writing by electron and optical lithography," Microelectron. Eng. 34 (3-4), 261-298 (1997).
10 K. Blüthner, M. Götz, A. Hadicke, W. Krech, T. Wagner, H. Mühlig, H. Fuchs, U. Hubner, D. Schelle, E. Kley, L. Fritzsch, "Single-electron transistors based on Al/AlOx/Al and Nb/AlOx/Nb tunnel junctions," IEEE Trans. Appl. Supercond. 7 (2, Part 3), 3099-3102 (1997).
9 R. Waldhäusl, B. Schnabel, E. Kley, A. Bräuer, "Efficient focusing polymer waveguide grating couplers," Electron. Lett. 33 (7), 623-624 (1997).
8 R. Waldhäusl, B. Schnabel, P. Dannberg, E. Kley, A. Bräuer, W. Karthe, "Efficient coupling into polymer waveguides by gratings," Appl. Optics 36 (36), 9383-9390 (1997).
7 M. Golub, M. Duparre, E. Kley, R. Kowarschik, B. Ludge, W. Rockstroh, H. Fuchs, "New diffractive beam shaper generated with the aid of e-beam lithography," Opt. Eng. 35 (5), 1400-1406 (1996).
6 M. Götz, K. Blüthner, W. Krech, A. Nowack, H. Fuchs, E. Kley, P. Thieme, T. Wagner, G. Eska, K. Hecker, H. Hegger, "Self-aligned in-line tunnel junctions for single-charge electronics," Physica B 218 (1-4), 272-275 (1996).
5 M. Götz, K. Blüthner, W. Krech, A. Nowack, H. Fuchs, E. Kley, P. Thieme, T. Wagner, G. Eska, K. Hecker, H. Hegger, "Preparation of self?aligned in?line tunnel junctions for applications in single?charge electronics ," J. Appl. Phys. 78 (9), 5499-5502 (1995).
4 W. Brunger, E. Kley, C. Schnabel, I. Stolberg, M. Zierbock, R. Plontke, "Low energy lithography; energy control and variable energy exposure," Microelectron. Eng. 27 (1-4), 135-138 (1995).
3 H. Meyer, H. Kohler, A. Chwala, K. Blüthner, P. Weber, E. Kley, W. Rockstroh, "Microwave circuit for the generation of Josephson voltages at low frequencies," Supercond. Sci. Technol. 7 (5), 327-329 (1994).
2 M. Manzel, H. Bruchlos, E. Steinbeiss, T. Eick, M. Klinger, J. Fuchs, B. Kley, "TiBaCaCuO-films for passive microwave devices," Physica C 201 (3-4), 337-339 (1992).
1 W. Zahn, P. Weber, K. Blüthner, E. Kley, "Submicron High Critical Current Density Niobium-Lead Josephson Junctions," Phys. Status Solidi A-Appl. Mat. 69 (1), K25-K28 (1982).